分子有序膜及其摩擦学行为研究进展

介绍了LB膜、自组装单分子膜(SAMs)、分子沉积(MD)膜等分子有序膜的基本概念和薄膜结构、厚度、性质以及微摩擦学行为的表征技术，并指出LB膜层问是物理吸附，热力学稳定性差；SAMs以化学键为驱动力，重现性较差；而分子沉积膜具有成膜不受基底形状和大小限制等优点，决定了它在微电子器件润滑方面具有更大的应用前景．在分子有序膜的摩擦学研究方面，着重介绍了分子有序膜本身结构(如物质种类、组成、分子链长、末端基团等)和外部条件(如法向载荷、扫描速率、相对湿度等)对摩擦学行为的影响．最后，提出了本领域需要关注的一些问题。

Molecular Ordered Films and Their Research Progress on Tribological Behavior

This article introduces the concepts of molecular ordered films including LB films, self-assembled monolayers, and molecular deposition films and their characterizations of structure, thickness,property and microtribology. And it points out that LB film whose interaction is physical adsorption is weak in thermal and mechanical stability; Driving force of SAMs is chemical bond, so their repetition is poor; While molecular deposition films have many advantages such as independence of substrate shape and size, they have applied prospect in tribological fields of microelectromechanical systems. In the tribology of molecular ordered films, we put emphasis on the influence of the structure such as species, component, molecular chain length, terminal groups and external condition including normal load, scanning rate and relative humidity on the tribological behaviors. At last, the subjects which deserve attention in nanotribology are suggested as well.