| LIGA实验站的设计及应用 |
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| 引用本文： | 田扬超,刘刚,洪义麟,郭育华,熊瑛,阚娅. LIGA实验站的设计及应用[J]. 中国科学技术大学学报, 2007, 37(4): 387-391 |
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| 作者姓名： | 田扬超 刘刚 洪义麟 郭育华 熊瑛 阚娅 |
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| 作者单位： | 中国科学技术大学国家同步辐射实验室,安徽合肥,230029 |
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| 基金项目： | 国家大科学工程(NSRL二期工程)资助项目 |
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| 摘 要： | 介绍了国家同步辐射实验室二期建设的LIGA实验站，研究了同步辐射光发散角对深度同步辐射光刻精度的影响；对深度同步辐射光刻扫描台的精度提出了理论要求；报道了深度同步辐射光刻、电铸和塑铸的实验结果．
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| 关 键 词： | 同步辐射 深度光刻 |
| 文章编号： | 0253-2778（2007）04＆05-0387-05 |
| 修稿时间： | 2006-12-202007-03-20 |
Design of LIGA end-station and its applications |
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| TIAN Yang-chao,LIU Gang,HONG Yi-lin,GUO Yu-hua,XIONG Ying,KAN Ya. Design of LIGA end-station and its applications[J]. Journal of University of Science and Technology of China, 2007, 37(4): 387-391 |
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| Authors: | TIAN Yang-chao LIU Gang HONG Yi-lin GUO Yu-hua XIONG Ying KAN Ya |
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| Affiliation: | National Synchrqtron Badiation Laboratory, University of Science and Technology of China, Hefei 230029, China |
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| Abstract: | LIGA end-station constructed in NSRL Phase II Project was presented. The effects of Fresnel diffraction and photo electrons on the accuracy of deep X-ray lithography were investigated, and then the parameters of the LIGA experimental end-station were obtained based on the calculations. At last the experiment results of the deep X-ray lithography, microelectroforming and plasti were presented. |
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| Keywords: | LIGA |
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