| 掠入射X射线显微镜反射率分析 |
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| 引用本文： | 赵玲玲,胡家升.掠入射X射线显微镜反射率分析[J].大连理工大学学报,2006,46(4):469-472. |
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| 作者姓名： | 赵玲玲 胡家升 |
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| 作者单位： | 大连理工大学,电子与信息工程学院,辽宁,大连,116024 |
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| 基金项目： | 国家高技术研究发展计划(863计划) |
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| 摘 要： | X射线掠入射显微镜的反射率除了与掠入射角有关之外，还与反射表面的粗糙度密切相关．以设计的非共轴掠入射KBAX射线显微镜系统为例，讨论了掠入射下X射线从金属表面和单层膜表面反射的两种情况．分析了波长为0．83nm时，表面均方粗糙度（RMS）对反射率的影响，并计算了该系统的X射线反射率．分析结果表明RMS增大，反射率会降低；无氧铜的反射率为0．021，单层膜的反射率为0．049，因此KBAX射线显微镜可采用镀单层膜的方法加工．
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| 关 键 词： | X射线成像 掠入射 表面粗糙度 反射率 |
| 文章编号： | 1000-8608（2006）04-0469-04 |
| 收稿时间： | 2005-12-25 |
| 修稿时间： | 2005-12-252006-05-18 |
Analyses of reflectivity of grazing incident X-ray microscope |
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| ZHAO Ling-ling,HU Jia-sheng.Analyses of reflectivity of grazing incident X-ray microscope[J].Journal of Dalian University of Technology,2006,46(4):469-472. |
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| Authors: | ZHAO Ling-ling HU Jia-sheng |
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| Institution: | School of Electr. and Inf. Eng., Dalian Univ. of Technol., Dalian 116024, China |
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| Abstract: | The reflectivity of X-ray grazing incident microscope is not only relevant to grazing incident angle,but also to surface roughness.Taking the non-coaxial grazing incident KBA X-ray microscope designed as an example,X-ray reflecting from metal surface and single film layer is discussed.At a wavelength of 0.83 nm,the influence of the surface root-mean-square roughness(RMS) on reflectivity is analyzed,and X-ray reflectivity of this system is calculated.The results show that reflectivity decreases with the increasing of RMS.Reflectivity of Cu is 0.021 and that of single film layer is 0.049,thus KBA X-ray microscope is made of single film layer. |
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| Keywords: | X-ray imaging grazing incidence surface roughness reflectivity |
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