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Deposition of textured diamond films on Si (100) substrates via microwave plasma chemical vapor deposition |
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| Affiliation: | ZHANG Wenjun, HU Bo HAN LiZHANG Fangqing CHEN Guanghua(Department of Physics, Lanzhou University, Lanzhou 730000, China) |
| Abstract: | |
| Keywords: | diamond films textured structure substrate bias. |
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