| 采用磁过滤MEVVA源制备DLC膜的研究 |
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| 引用本文： | 张旭,张通和,易仲珍,张荟星,王广甫.采用磁过滤MEVVA源制备DLC膜的研究[J].北京师范大学学报(自然科学版),2002,38(4):478-481. |
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| 作者姓名： | 张旭 张通和 易仲珍 张荟星 王广甫 |
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| 作者单位： | 1. 北京师范大学射线束技术与材料改性教育部重点实验室,低能核物理研究所,北京市辐射中心;2. 北京师范大学分析测试中心:,100875,北京 |
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| 基金项目： | 国家自然科学基金;50141022; |
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| 摘 要： | 采用磁过滤MEVVA沉积技术以石墨为阴极在几种衬底表面(单晶硅、不锈钢和工具钢等)上制备高质量类金刚石(DLC)薄膜.实验结果表明,沉积能量对薄膜的sp3键含量的影响为先随能量的增加而增加,达到最大值后,再增加沉积能量含量反而下降.硬度测试结果表明,非晶金刚石薄膜具有极高的硬度,为70～78GPa,远远高于衬底材料的硬度值.对非晶金刚石薄膜的摩擦性能试验结果表明,非晶金刚石薄膜的摩擦因数为0.16～0.2,大大低于衬底材料.
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| 关 键 词： | 磁过滤 类金刚石膜 金属蒸汽真空弧 |
| 修稿时间： | 2001年12月27日 |
DLC FILMS PREPARED BY FILTERED MEVVA SYSTEM |
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| Zhang Xu,Zhang Tonghe,Yi Zhongzhen,Zhang Huixing,Wang Guangfu.DLC FILMS PREPARED BY FILTERED MEVVA SYSTEM[J].Journal of Beijing Normal University(Natural Science),2002,38(4):478-481. |
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| Authors: | Zhang Xu Zhang Tonghe Yi Zhongzhen Zhang Huixing Wang Guangfu |
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| Abstract: | The structure, mechanical properties and wear resistance of tetrahedral amorphous carbon films deposited on silicon and Cr18Ni9 stainless steel by pulsed filtered catholic vacuum arc system are investigated. The high quality tetrahedral amorphous carbon films with sp3 content higher than 80% are obtained. The hardness of tetrahedral amorphous carbon films is determined by nano indentation tests. The results show that tetrahedral amorphous carbon films have much higher hardness and elastic modulus than substrate silicon and stainless steel. Wear test results show: the tetrahedral amorphous carbon films have lower wear coefficient volume than that of silicon and stainless steel. |
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| Keywords: | filtered arc DLC MEVVA |
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