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基于兰姆波技术的液体密度声传感器
引用本文:施文康,马伟方,侯毅. 基于兰姆波技术的液体密度声传感器[J]. 上海交通大学学报, 2001, 35(9): 1340-1342
作者姓名:施文康  马伟方  侯毅
作者单位:上海交通大学仪器工程系,;上海交通大学仪器工程系,;上海交通大学仪器工程系,
基金项目:上海市科技发展基金资助项目(999314016)
摘    要:在考虑晶体的压电性和各向异性基础上,从声的波动理论出发,对叉指换能器在液体-压电晶片界面上兰姆波的激发理论及基性质进行了研究,分析了兰姆波对液体密度变化的敏感情况,提出了一种基于兰姆波技术的测量液体密度微小变化声传感器,根据传感器敏感液体的特点,对其进行实验分析,取得了较好的效果。实验结果表明,这种传感器具有良好的性能。

关 键 词:液体密度  兰姆波技术  叉指换能器  激发理论  压电晶片
文章编号:1006-2467(2001)09-1340-03
修稿时间:2000-11-14

Liquid Density Sensor Based on Lamb Wave Technology
SHI Wen kang,MA Wei fang,HOU Yi. Liquid Density Sensor Based on Lamb Wave Technology[J]. Journal of Shanghai Jiaotong University, 2001, 35(9): 1340-1342
Authors:SHI Wen kang  MA Wei fang  HOU Yi
Abstract:This paper narrated the development and application of the density sensors for liquid, and analyzed their disadvantages of current sensors such as low accuracy, large sample required. To solve these problems, the properties of Lamb wave excited by interdigital transducer in the piezoelectric substrate covered by liquid were studied based on its piezoelectricity and anisotropy. The sensitivity of Lamb wave was analyzed and the working theory of a novel density sensor for liquid based on the Lamb wave technology was presented. According to the properties of sensor, the experiments have been done on it. The results show that the sensor has nice performance, which can provide new ideas for further research on the density sensor for liquid.
Keywords:liquid density  Lamb wave technology  interdigital transducer  excitation theory  piezoelectric substrate
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