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红外激光诱导Mn2(CO)10的热分解沉积动力学
引用本文:王悟敏 侯惠奇. 红外激光诱导Mn2(CO)10的热分解沉积动力学[J]. 复旦学报(自然科学版), 1993, 32(3): 294-300
作者姓名:王悟敏 侯惠奇
作者单位:复旦大学原子核科学系,复旦大学原子核科学系,复旦大学原子核科学系 1992届博士研究生
摘    要:


关 键 词:热分解沉积 激光 诱导 十羰基锰

KINETICS OF IR LASER INDUCED PYROLYTIC DEPOSITION FROM Mn_2(CO)_(10)
Wang Wumin,Hou Huiqi,Qin Qizong. KINETICS OF IR LASER INDUCED PYROLYTIC DEPOSITION FROM Mn_2(CO)_(10)[J]. Journal of Fudan University(Natural Science), 1993, 32(3): 294-300
Authors:Wang Wumin  Hou Huiqi  Qin Qizong
Affiliation:Department of Nuclear Science
Abstract:
Using He-Ne laser monitor transmitance measure in-situ method,the kinetics of pyrolytic deposition from Mn_2(CO)_(10) induced with OW CO_2 laser is studied. The dependence of the deposition rate on the laser intesity power has been obtained, at a given temperature,the threshold power is 4 W. The deposition rate increases with laser intensity when the laser intensity power is within the region from 4 Wto 12 W and becomes a constant when P is bigger than 12 W.The apparent activation energy for pyrolytic deposition of Mn_2(CO)_(10) on quartz substrate is 26 kJ/mol. The effecct of the vapor of Mn_2(CO)_(10) and added gases (CO,O_2 and Ar) has also been studied, the result shows that the deposition rates decrease obviously with increasing the partial presures of added gases.
Keywords:infrared heating  thermal decomposed deposition  dynamics  manganese compounds  decacarbonyl-dimanganese
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