| 静电六极球差矫正系统的理论计算 |
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| 引用本文： | 朱世华,胡宗高.静电六极球差矫正系统的理论计算[J].云南大学学报(自然科学版),2001,23(3):196-198,212. |
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| 作者姓名： | 朱世华 胡宗高 |
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| 作者单位： | 云南大学物理系, |
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| 基金项目： | 云南省应用基础研究基金资助项目 |
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| 摘 要： | 限制电子显微镜分辨本领的主要因素是电子透镜的球差，对一系列的六极系统进行了理论计算和分析，计算表明利用2个静电六极透镜和1个中间透镜的系统可以消除3级球差。
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| 关 键 词： | 球差矫正器 静电六极透镜 电子显微镜 中间透镜 分辨率 球差系数 |
| 文章编号： | 0258-7971(2001)03-0196-03 |
Theoretical Computation of an Electrostatic Sextupole System for Correction of Sphrical Aberration |
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| ZHU Shi hua,HU Zhong gao.Theoretical Computation of an Electrostatic Sextupole System for Correction of Sphrical Aberration[J].Journal of Yunnan University(Natural Sciences),2001,23(3):196-198,212. |
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| Authors: | ZHU Shi hua HU Zhong gao |
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| Abstract: | The spherical aberration of electron lens is always the principle factor which limits the resolution of electron microscope.A theoretical computation of a series of sextupole correctors to correct spherical aberration in around lens is presented.The computation results show that the system we have proposed,which consists of two electrostatic sextupoles separated by a lens, appears to be capable of correcting the third spherical aberration. |
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| Keywords: | spherical aberration corrector electrostatic sextupole system electron microscope |
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