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| 用拉曼波谱分析金刚石膜的内应力 | |
| 引用本文： | 方亮 陈星明. 用拉曼波谱分析金刚石膜的内应力[J]. 重庆大学学报(自然科学版), 1999, 22(5): 79-84 |
| 作者姓名： | 方亮 陈星明 |
| 作者单位： | [1]重庆大学理学院 [2]重庆大学机械工程学院 |
| 摘 要： | 对拉曼波谱测量金刚石薄膜内应力时存在的差异现象进行了分析。研究表明应力方向和晶体取向的未知，导致多晶金刚石薄膜中应力值与拉曼波谱位移量之间的比例系数难以准确选取，是造成计算出的内应力结果不一致的原因之一。 |
| 关 键 词： | 金刚石 薄膜 化学汽相沉积/拉曼波谱 内应力 |
Analysis on Internal Stress in Polycrystalline Diamond Films Measured by Raman Spectroscopy |
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| FANG Liang,WANG Wan lu,CHEN Xing ming,GUO Zhong cheng,LIAO Ke jun. Analysis on Internal Stress in Polycrystalline Diamond Films Measured by Raman Spectroscopy[J]. Journal of Chongqing University(Natural Science Edition), 1999, 22(5): 79-84 | |
| Authors: | FANG Liang WANG Wan lu CHEN Xing ming GUO Zhong cheng LIAO Ke jun |
| Abstract: | The divagation of the internal stress in diamond films is analyzed .It's found that due to the unknown directions of the stress and crystallographic axes , the proportional parameter to express the relationship between the stress and the shift of Raman spectrum is hard to obtain precisely , resulting in the divagation of the internal stresses which are calculated from the shift of Raman spectrum. |
| Keywords: | diamond films chemical vapour deposition / Raman Spectroscopy internol stress |
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