半导体设备预防性维护建模与优化方法研究

半导体生产线造价昂贵,制造工艺复杂.其维护具有维护费用高、维护难度大等特点.为了降低生产系统的整体维护成本,保证整个生产系统的稳定运行,本文通过伽马过程描述设备退化规律,对设备的衰退情况进行分类维护.针对随机退化的生产线提出考虑机会维护的预防性维护建模方法.以总维护费用最小化为目标,建立了维修费用模型,结合更新定理给出了模型求解的方法,对检测周期等参数进行优化分析.并分析了检测成本、间隔时间相互影响关系.仿真结果表明建立的预防性维护模型可行且有效.

Research on preventive maintenance modeling method of semiconductor devices

Semiconductor production is a complex manufacturing process. The maintenance of semiconductor equipment is costive and difficult. In order to lower maintenance costs and ensure steady operation of the whole production system, this paper strives to make preventive hierarchical maintenance considering opportunity maintenance for a degrading production line. We use the Gamma process to model the equipment degradation process. The objection of maintenance cost was analyzed under different detection periods. Optimization problem was solved through Monte Carlo simulation and renewal theory. The relationship of detecting cost and the detection interval are analyzed with this algorithm. The simulation shows that the preventive maintenance strategy is feasible and effective.