| 利用CCD接收激光衍射的方法测量精密缝宽和圆孔直径 |
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| 引用本文： | 杨飒.利用CCD接收激光衍射的方法测量精密缝宽和圆孔直径[J].河北省科学院学报,2009,26(3):13-15. |
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| 作者姓名： | 杨飒 |
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| 作者单位： | 天津大学精密仪器与光电子工程学院,天津,300072 |
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| 摘 要： | 用CCD摄像头与图像数据采集系统进行尺寸测量是CCD应用最广泛的领域。本文将通过探究He—Ne激光器对待测物件的衍射形成光斑的原理出发．研究CCD对光斑的接受和处理．最终识别需要的衍射条纹，从而测得精密仪器中的缝宽和精密的圆孔直径。
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| 关 键 词： | CCD 激光衍射 精密缝宽 精密圆孔直径 |
Using CCD censor to receive the Laser diffraction and measure the precise slot width and round hole radius |
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| YANG Sa.Using CCD censor to receive the Laser diffraction and measure the precise slot width and round hole radius[J].Journal of The Hebei Academy of Sciences,2009,26(3):13-15. |
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| Authors: | YANG Sa |
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| Institution: | YANG Sa (College of Precision Instrument and Opto-eletronics Engineering,Tianjin University,Tianjin 300072,China) |
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| Abstract: | The CCD image censor with image data acquisition system has been widely used in size measurement of work piece.In this paper,we try to research the faculas receiving and processing of CCD by exploring the principle of He-Ne Laser diffraction on the test object and forming faculas.Finally,we can recognize diffraction fringes that needed and measure the precise width of slit and precise radius of round hole. |
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| Keywords: | CCD |
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