基于压阻反馈信号纳米梁非线性振动控制

研究了基于硅压阻效应纳米梁非线性振动控制方法。在纳米梁固定端上表面粘贴硅压阻膜片,压阻膜片的电阻值随着纳米梁的振动发生变化。利用惠斯通电桥电路提取振动信号作为电压反馈控制信号,控制纳米梁的非线性振动。用多尺度法求解方程,得到系统主共振的幅频响应方程。由幅频响应方程分析系统非线性振动方程解的稳定性,研究了交流激励电压幅值、阻尼、反馈增益参数对系统稳定性和振幅的影响规律。研究结果表明:激励电压由0.25 V减小至0.1 V时,最大振幅衰减60%。无量纲阻尼由0.058 5增加至0.087 8时,最大振幅衰减40%。增大阻尼和反馈增益参数可以减弱甚至消除纳米梁振动的非线性特性。该研究成果为纳米梁非线性振动控制及信号提取提供了一种理论方法。

Nonlinear Vibration Control of Nanobeam Based

In this paper, the nonlinear vibration control method of nanobeam based on silicon piezoresistive effect is studied. A silicon piezoresistive film is adhered on the upper surface of the fixed end of the nanobeam, and the resistance value of the pressure film changes with the vibration of the nanobeam. The vibration signal extracted by the Wheatstone bridge circuit is used as a voltage feedback control signal to control the nonlinear vibration of the nanobeam. The multi-scale method is used to solve the equation, and the amplitude frequency response equation of the main resonance of the system is obtained. The stability of the solution of the nonlinear vibration equation of the system is analyzed by the amplitude-frequency response equation, and the influence of the amplitude, damping and feedback gain parameters of the AC excitation voltage on the stability and amplitude of the system. The results show that the maximum amplitude is attenuated by 60% when the excitation voltage is reduced from 0.25V to 0.1V. When the dimensionless damping is increased from 0.0585 to 0.0878, the maximum amplitude is attenuated by 40%. Increasing the damping and feedback gain parameters can attenuate or even eliminate the nonlinear characteristics of the nanobeam vibration. The research results provide a theoretical method for nonlinear vibration control and signal extraction of nanobeams.