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硅MEMS陀螺教学实验平台搭建
引用本文:郭占社,曹乐,王显波,韩景轩.硅MEMS陀螺教学实验平台搭建[J].实验室科学,2013,16(1):184-186.
作者姓名:郭占社  曹乐  王显波  韩景轩
作者单位:1. 北京航空航天大学仪器科学与光电工程学院,北京,100191
2. 中国北方车辆研究所底盘部件技术部,北京,100072
摘    要:基于硅MEMS陀螺体积小,工作原理较抽象,课堂教学接受比较困难的问题,搭建了一种硅MEMS( Micro electro-mechanical System)陀螺教学实验平台。该实验平台主要由高精度转台、MEMS陀螺芯片、A/D转换电路、单片机数据采集及处理电路、液晶显示装置等组成。通过高精度转台等标准标定装置,对实验平台的性能进行了评价。结果表明:系统性能良好,能够满足实验要求。

关 键 词:MEMS陀螺  教学实验平台  高精度转台  单片机

Construction of the teaching experimental platform for silicon MEMS gyroscope
GUO Zhan-she , CAO Le , WANG Xian-bo , HAN Jing-xuan.Construction of the teaching experimental platform for silicon MEMS gyroscope[J].Laboratory Science,2013,16(1):184-186.
Authors:GUO Zhan-she  CAO Le  WANG Xian-bo  HAN Jing-xuan
Institution:1(1.School of Instrument Science & Opto-electronics Engineering,Beihang University,Beijing 100191,China;2.Department of Chassis Components Technology,China North Vehicle Research Institute,Beijing 100072,China)
Abstract:Based on the problem solution of little bulk and hard to be understood during the course of the class teaching for the MEMS (Micro Electro-Mechanical System) gyroscope, this paper introduces the design and fabrication of a teaching experimental platform. It is mainly composed of a high preci- sion turntable, MEMS gyroscope chip, A/D converter circuit, a single-chip microcomputer data col- lection unit and the LED display unit. Performance of the system is calibrated using the high precision turntable. This experimental system will offer great help to the undergraduate students and graduate students on the understanding of this kind of sensor.
Keywords:MEMS gyroscope  teaching experimental platform  high precision turntable  single-chip microcomputer
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