| 溶胶-凝胶法ZnO薄膜的制备及性能表征 |
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| 引用本文： | 辛春雨, |张继德, |刘成有, |蒋大勇, |秦杰明.溶胶-凝胶法ZnO薄膜的制备及性能表征[J].吉林大学学报(理学版),2012,50(1):122-125. |
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| 作者姓名： | 辛春雨 |张继德 |刘成有 |蒋大勇 |秦杰明 |
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| 作者单位： | 1. 白城师范学院 物理系, 吉林 白城 137000,2. 通化师范学院 物理系, 吉林 通化 134001,3. 长春理工大学 材料科学与工程学院, 长春 130022 |
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| 基金项目： | 吉林省科技厅发展计划项目(批准号:201101103);内蒙古自然科学基金(批准号:2010MS0105) |
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| 摘 要： | 采用溶胶-凝胶法在玻璃衬底上制备ZnO薄膜, X射线衍射(XRD)结果表明: 晶粒尺寸随退火温度的升高而增大, 与原子力显微镜(AFM)分析薄膜表面形貌的结果相符; UV\|Vis吸收谱线表明, 在ZnO带边吸收的位置出现较强的吸收, 并得到600 ℃退火处理的薄膜禁带宽度为3.23 eV; 室温光致发光谱表明, 所有薄膜均在386.5 nm处出现一个紫外发射峰, 当退火温度升高时, 深能级发射受到抑制.
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| 关 键 词： | 溶胶-凝胶法 ZnO薄膜 光学性能 |
| 收稿时间： | 2011-01-26 |
Preparation and Performance Characterization of Zinc Oxide Thin Films by Means of Sol-Gel Method |
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| XIN Chun-yu,ZHANG Ji-de,LIU Cheng-you,JIANG Da-yong,QIN Jie-ming.Preparation and Performance Characterization of Zinc Oxide Thin Films by Means of Sol-Gel Method[J].Journal of Jilin University: Sci Ed,2012,50(1):122-125. |
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| Authors: | XIN Chun-yu ZHANG Ji-de LIU Cheng-you JIANG Da-yong QIN Jie-ming |
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| Institution: | 1. Department of Physics, Baicheng Normal University, Baicheng 137000, Jilin Province, China|2. Department of Physics, Tonghua Normal University, Tonghua 134001, Jilin Province, China|3. School of Materials Science and Engineering, Changchun University of Science and Technology, Changchun 130022, China |
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| Abstract: | Zinc oxide thin films were synthesized on glass substrates by means of sol-gel method.The X-ray diffraction(XRD) results show that the grain size increased with the increasing of annealing temperature,which was confirmed by the morphology by atomic force microscopy(AFM).The UV-Vis results show that there is a stronger absorption on the near band edge of zinc oxide and the bandgap of the film at 600 ℃ by means of annealing treatment is 3.23 eV.Room-temperature photoluminescence(PL) results show that all films show UV emission peak at 386.5 nm,the deep level emission is restrained by the increase of annealing temperature. |
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| Keywords: | sol-gel method zinc oxide thin film optical property |
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