| 牺牲层腐蚀技术在微悬臂梁器件制作中的应用 |
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| 引用本文： | 赵翔,梁明富. 牺牲层腐蚀技术在微悬臂梁器件制作中的应用[J]. 科学技术与工程, 2009, 9(14) |
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| 作者姓名： | 赵翔 梁明富 |
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| 作者单位： | 扬州市职业大学,扬州,225009;扬州市职业大学,扬州,225009 |
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| 摘 要： | 以微悬臂梁的制造工艺为例,探讨了MEMS中的牺牲层腐蚀技术,对牺牲层材料的制备方法和腐蚀牺牲层材料得到微悬臂梁结构等工艺中的关键与核心技术作了详细阐述,从腐蚀机理的角度探讨了腐蚀速率及其影响因素。
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| 关 键 词： | MEMS 微悬臂梁 牺牲层腐蚀 腐蚀速率 |
Sacrificial Layer Etching Technology and It s Application on Micro-cantilever Beam |
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| ZHAO Xiang,LIANG Ming-fu. Sacrificial Layer Etching Technology and It s Application on Micro-cantilever Beam[J]. Science Technology and Engineering, 2009, 9(14) |
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| Authors: | ZHAO Xiang LIANG Ming-fu |
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| Affiliation: | Yangzhou Polytechnic College;Yangzhou 225009;P.R.China |
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| Abstract: | The micro-cantilever beam manufacture is take of as an example,has discussed in the MEMS sacrifice level corrosion technology,to sacrificed the level material the preparation method and the corrosion sacrifice level material obtains craft and so on micro in cantilever beam structure keys and the core technologies has made the detailed elaboration,has discussed the corrosion rate and the influence factor from the corrosion mechanism angle. |
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| Keywords: | microelectro-mechanical system micro-cantilever beam sacrificial layer etching etching rate |
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