| 椭偏谱法测量类金刚石薄膜的质量 |
| |
| 引用本文： | 杜泉,邓学儒,郭文胜.椭偏谱法测量类金刚石薄膜的质量[J].四川师范大学学报(自然科学版),2005,28(6):687-690. |
| |
| 作者姓名： | 杜泉 邓学儒 郭文胜 |
| |
| 作者单位： | 西华大学,应用物理研究所,网川,成都,610039;四川大学,电子信息学院,四川,成都,610064 |
| |
| 摘 要： | 应用椭偏光谱法研究了一系列不含氢DLC样品,讨论了样品制备与测量、模型的建立及多样品分析法和椭偏数据拟合,表明椭偏光谱法可以确定DLC膜的厚度,并可反映出sp3成份百分比变化与制备时偏置电压的关系.
|
| 关 键 词： | 椭偏光谱仪 类金刚石薄膜 sp3/sp2 多样品分析法 |
| 文章编号： | 1001-8395（2005）06-0687-04 |
| 收稿时间： | 2004-09-01 |
| 修稿时间： | 2004年9月1日 |
Ellipsometric Spectrum Study on Diamond-like Carbon Films |
| |
| DU Quan,DENG Xue-ru,GUO Wen-sheng.Ellipsometric Spectrum Study on Diamond-like Carbon Films[J].Journal of Sichuan Normal University(Natural Science),2005,28(6):687-690. |
| |
| Authors: | DU Quan DENG Xue-ru GUO Wen-sheng |
| |
| Institution: | 1. Institute of Applied Physics, Xihua University, Chengdu 610039, Sichuan; 2. College of Electronic Information, Sichuan University, Chengdu 610064, Sichuan |
| |
| Abstract: | A series of hydrogen-free carbon films are prepared and spectroscopic ellipsometry is applied to study them.Sample preparation and measurement,model establishment,multi-sample analysis,ellipsometry data fitting are also discussed.The results show that the thicknesses of the diamond-like carbon films can be determined and the fraction of sp~3 in the diamond-like carbon films has also been obtained.The correlation between the fraction of sp~3 and the biased voltage has been observed. |
| |
| Keywords: | Ellipsometer Diamond-like carbon films sp~3/sp~2 Multi-sample analysis |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
|
