硅微机械悬臂梁谐振器的电热激励及光纤拾振技术的研究

用理论分析方法研究了硅微悬臂梁的电热激振机理，得到了微机械悬臂梁电热激励下的温度场分布，并推导出了镀膜双层硅微悬臂梁的电热激励热力矩。利用硅微机械加工工艺制作了双层结构硅微悬臂梁谐振器，通过在硅微悬臂梁上制作的热激励电阻，用电热方法对硅微谐振器实现了激振。设计了光纤传感检测系统用于硅微谐振器微弱谐振信号的拾取，并成功检测到了硅微谐振器的前3阶谐振信号。

The Electro-Thermally Excitation of Silicon Microcantilever Resonator and Optical Fiber Pickup Vibrating Technology

The theoretical analysis method is used to study the electro-thermally excited mechanism of silicon microcantilever beam so as to obtain the temperature field distribution under the electro-thermal excitation of the microcantilever beam and to deduce thermal moment force of the electro-thermal excitation of the plated film bi-layer silicon-microcantilever beam. The silicon micro-machining technology is used to fabricate the bi-layered silicon microcantilever resonators, the excitation of silicon micro-resonators is achieved using electro-thermal method via fabricating thermal excitation resistance on the silicon microcantilever beam. The optical fiber sensing monitoring system designed is used to pick up the weak signals of the microresonators and also successfully to detect the first three resonant modes of the silicon microresonators.