| 片状气体放电电子束强度与能量分布的实验研究 |
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| 引用本文： | 罗宗南,崔一平,陈松生,杨正名.片状气体放电电子束强度与能量分布的实验研究[J].东南大学学报(自然科学版),1995(4). |
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| 作者姓名： | 罗宗南 崔一平 陈松生 杨正名 |
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| 作者单位： | 东南大学电子工程系 |
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| 摘 要： | 片状气体放电电子束强度与能量分布的实验研究罗宗南，崔一平，陈松生，杨正名（东南大学电子工程系．南京２１００１８）气体放电电子束强度高，能量大，在微电子、光电子、加工、材料科学、等离子化学以及表面处理等方面有着广泛的应用前景，加以成本低廉、操作方便，是...
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Study in Intensity Profile and Energy Spectrum of Flare Shaped Electron Beam Generated in Soft Vacuum |
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| Luo Zongnan,Cui Yiping,Cheng Songsheng,Yang Zhengming.Study in Intensity Profile and Energy Spectrum of Flare Shaped Electron Beam Generated in Soft Vacuum[J].Journal of Southeast University(Natural Science Edition),1995(4). |
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| Authors: | Luo Zongnan Cui Yiping Cheng Songsheng Yang Zhengming |
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| Abstract: | A new modified Faraday cup is designed,for measuring energy spectrum it cal effectively limit the uifluence of the parasitic plasma and ionization generated inside the detector by beam itself.Results show that the component of high energy electron is major in the beam,and with the pressuregetting lower the beam energy growthes,the compenent of high energy electrons inereases,The beamintensity along the width is uniform but beam profile acrase beam width is Gaussian profile. |
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| Keywords: | gas discharge energe spectrum/beam intensity flake shaped electron beam |
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