| 薄膜定量分析中的Auger线型分析方法 |
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| 引用本文： | 张庆瑜,马腾才.薄膜定量分析中的Auger线型分析方法[J].大连理工大学学报,1997,37(2):147-153. |
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| 作者姓名： | 张庆瑜 马腾才 |
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| 作者单位： | 大连理工大学三束材料改性国家重点实验室 |
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| 摘 要： | 采用Ａｕｇｅｒ线型分析方法－因子分析方法和已知组元强度的定量解谱技术，对电子束辅助Ｎ离子注入Ｓｉ和磁控溅射方法制备的ＴｉＮｘ薄膜的高分辨率俄歇电子能谱（ＡＥＳ），进行了定量分析。讨论了化学成分对ＡＥＳ线型的影响及线型分析技术的有效性和应用范围。
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| 关 键 词： | 俄歇电子谱法 定量分析 线型分析 薄膜 |
Auger line shapes analysis methods for quantitative determination of films |
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| Zhang Qingyu,Ma Tengcai.Auger line shapes analysis methods for quantitative determination of films[J].Journal of Dalian University of Technology,1997,37(2):147-153. |
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| Authors: | Zhang Qingyu Ma Tengcai |
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| Abstract: | Two Auger line shapes analysis methods, the factor analysis method and the quantitative determination method of the intensities of known components, were applied to the quantitative determination of TiN x films and the composition depth profiles of N implanted in Si assisted by electron beams. The effects of chemical states on Auger line shapes and the effective and applicable ranges are discussed here. |
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| Keywords: | Auger electron spectrometry films quantitative analysis/Auger line shapes analysis |
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