Fabrication and properties of anodic alumina humidity sensor with through-hole structure |
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| Authors: | Ling ZhiYuan Chen ShuoShuo Wang JinChi Li Yi |
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| Institution: | Department of Electronic Materials Science and Engineering, Institute of Materials, South China University of Technology, Guangzhou 510640, China |
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| Abstract: | Through-hole structural humidity sensor was fabricated by radio-frequency magnetron sputtering deposition of gold electrodes
on two sides of anodic aluminum oxide (AAO) membranes which were prepared by two-step anodization procedure at 0–5°C and 40
V in 0.5 mol/L oxalic acid electrolyte. The investigation on the impedance at various humid conditions showed a linear relationship
between impedance and relative humidity over the range of 12%–97% RH. Other excellent properties such as rapid response and
good reproducibility were also obtained.
Supported by the research fund of Key Lab of Specially Functional Materials, Ministry of Education, China |
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| Keywords: | humidity sensor anodic aluminum oxide nanopore electrode |
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