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A new DFM flow for sub-100nm standard cells |
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| Authors: | Shi Zheng Yan Xiaolang Zhang Peiyong Ji Xuemei |
| Abstract: | DFM (Design-For-Manufacturability) method, which aims to improve manufacturability of ICs through specific design considerations, is becoming important nowadays. In particular, standard cells now should be designed by DFM method. This paper reports a new DFM flow for sub-100 nm standard cell design with a group of technologies for process modeling, manufacturability simulation and trial RETs.Based on this flow, a set of DFM-friendly 90m standard cells were designed. |
| Keywords: | DFM RET OPC manufacturability yield standard cell |
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