| 毫米波MEMS开关自激励机理实验验证结构的模拟与设计 |
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| 引用本文： | 肖建斌,廖小平,周易. 毫米波MEMS开关自激励机理实验验证结构的模拟与设计[J]. 东南大学学报(自然科学版), 2011, 41(5): 923-928. DOI: 10.3969/j.issn.1001-0505.2011.05.006 |
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| 作者姓名： | 肖建斌 廖小平 周易 |
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| 作者单位： | 东南大学MEMS教育部重点实验室,南京,210096 |
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| 基金项目： | 国家自然科学基金资助项目(60976094,61076108,60676043) |
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| 摘 要： | 提出了一种新型的毫米波MEMS开关自激励机理的实验验证结构,该结构由一分四功率分配器和5个相同开关形成的阵列组成.通过CST Microwave Studio和HFSS电磁仿真软件完成了一分四功率分配器和开关阵列的设计.在频率为35 GHz时,一分四功率分配器的4个输出端口的隔离度小于-48 dB,同时由于结构的对称性...
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| 关 键 词： | 毫米波 MEMS开关 自激励 实验验证 |
Simulation and design of structure for experimental verification of self-actuation of millimeter-wave MEMS switch |
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| Xiao Jianbin,Liao Xiaoping,Zhou Yi. Simulation and design of structure for experimental verification of self-actuation of millimeter-wave MEMS switch[J]. Journal of Southeast University(Natural Science Edition), 2011, 41(5): 923-928. DOI: 10.3969/j.issn.1001-0505.2011.05.006 |
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| Authors: | Xiao Jianbin Liao Xiaoping Zhou Yi |
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| Affiliation: | Xiao Jianbin Liao Xiaoping Zhou Yi(Key Laboratory of MEMS of Ministry of Education,Southeast University,Nanjing 210096,China) |
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| Abstract: | A new type of structure for experimental verification of self-actuation of millimeter-wave MEMS switch is presented.The structure,which is designed using electromagnetic simulation software CST Microwave Studio and HFSS,consists of a four-way power divider and an array of five same switches.The input signal is equally divided into four output signals in the four-way power divider due to the structure symmetry,while the isolation between any two output ports is less than-48dB at 35GHz.These two characteristi... |
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| Keywords: | millimeter-wave MEMS switch self-actuation experimental verification |
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