| 集成CMOS流量传感器 |
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| 引用本文： | 沈克强. 集成CMOS流量传感器[J]. 东南大学学报(自然科学版), 1995, 0(6) |
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| 作者姓名： | 沈克强 |
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| 作者单位： | 东南大学微电子中心 |
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| 摘 要： | 本文提出了一种与硅栅ＣＭＯＳ工艺相兼容的集成ＣＭＯＳ流量传感器，该器件由于采用了交叉差分恒流源技术，与硅双极型流量传感器相比，具有相近的灵敏度。
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| 关 键 词： | 传感器，流量，灵敏度 |
An Integrated CMOS Flow Sensor |
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| Shen Keqiang. An Integrated CMOS Flow Sensor[J]. Journal of Southeast University(Natural Science Edition), 1995, 0(6) |
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| Authors: | Shen Keqiang |
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| Abstract: | A novel integrated CMOS flow sensor compatible with Si-gate CMOS IC process is present-ed.The sensitivity of the device is as high as that of the silicon bipolar transistor flow sensors becauseof the cross-differential constant current technique. |
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| Keywords: | sensor flow rate sensitivity |
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