通用多边形覆盖算法及图形分解软件

通用多边形覆盖算法及图形分解软件袁为民（南洋信息与控制工程公司）关键词算法，多边形覆盖，掩膜图形分解中留法分类号ＴＰ３１７１文献回顾和算法简述针对集成工艺中所涉及的掩膜图形的多样性和复杂性，本文提出一种通用性较强的多边形覆盖算法，并已实现为图形分解软...

An Effective Polygon Covering Algorithm and Pattern Processing Software

The decomposing of the mask pattern used in integrating technology can be generalized to the problem of covering polygon by rectangles. An algorithm with the purpose of general applicability and reaching the minimum of the exposure number is proposed and its realization is discussed in detail. The keypoints are to remove the hole in advance and change the polygon border immedately after each rectangle is formed. The correspondent software has been successfully applied to a set of mask patterns of magnetic head. In principle, it's application can be extended to generate the exposure control file of every type of mask pattern and the result will be satisfied.