氧化锌基薄膜的制备及其光学性质的研究现状

ZnO作为制造高效率短波长发光和激光器件的理想材料,在磁学和电学等方面已经取得了巨大的研究进展,但是在掺杂状态对调控ZnO薄膜的发光行为方面至今鲜有报道。介绍了ZnO薄膜材料的基本结构和特性,综述了ZnO基薄膜的制备技术及其优缺点。此外,借助紫外发光和可见发光这两种发光机制,探讨了Co、Sn单掺及Co、Sn共掺ZnO薄膜的可见光发光特性,同时指出掺杂元素和掺杂量对薄膜能带结构的影响。最后,对ZnO基薄膜材料的应用工作和今后的发展方向进行了展望。

Current Researches on Preparation of ZnO Thin Film and Its Optical Properties

As an ideal material for efficient short-wavelength luminescence and laser devices, ZnO has witnessed great research progress in magnetics and electronics. However, researches on regulation of the luminescence behavior of ZnO films in doped states are still rarely reported. This paper first introduces the fundamental structures and traits of ZnO-based thin films, then reviews the ZnO film preparation technologies and their advantages and disadvantages. Besides, adopting UV and visible light emission mechanisms, this paper discusses the luminescence mechanism and traits of Co and/or Sn doped ZnO films, and points out the effects of doping elements and doping levels on the band structure of ZnO thin films. Finally, it describes the applications and the future development of ZnO-based thin films.