基于平面等倾干涉原理的平面度视觉测量系统

介绍一种基于平面等倾干涉原理的机器视觉高精度平面度测量系统。它利用等倾干涉原理 ,通过CCD提取随平面度变化的明暗相交干涉圆环条纹信息 ,根据条纹中心不变性和中心对称性 ,以开始测量点适当级次条纹中心为参考条纹 ,间隔 90°建立 4个扇形窗口 ,对窗口内条纹信息处理 ,得到细化后条纹与参考条纹径向间距 ,参照前一测量点干涉条纹径向位置 ,得到干涉条纹在各测点的变化量N。该N值既能反映出半波长整数倍 ,又能反映半波长小数倍的测点高度差信息 ,利用最小二乘原理 ,处理N值 ,得到极高精度的平面度测量误差。

Machine Vision Aided Testing System for Flatness Based on Equal Inclination Interference Theory

An approach is described on the automated tracking of interference circle fringe to get the flatness accurately based on the Equal Inclination Interference Theory (EIIT). The system,based on the theory of EIIT, can be applied to grasp the changing fringe information, which is white alternating with black through the CCD camera. Following the basic principle of fringes image centro-symmetric, we create some windows, process only the interference fringes information in the windows. According to the position of the processed interference fringe and the position of the last adjacent interference fringe in the windows, the interference fringe variation value N from the starting measured point is received, it implies the changed altitude value from the starting measurement point. This method allows us not only get the fringe information of the half-wavelength integer multiple but also denote those of the half-wavelength decimal multiple. The system is proved to be effective experimentally. It is useful in metrology department for the high-precision flatness standard unit.