| 直流辉光放电等离子体增强化学气相法制备金刚石及氮化碳薄膜 |
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| 引用本文： | 于威,王淑芳,丁学成,韩理,刘志强,张连水,傅广生. 直流辉光放电等离子体增强化学气相法制备金刚石及氮化碳薄膜[J]. 河北大学学报(自然科学版), 2000, 20(1): 78-82 |
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| 作者姓名： | 于威 王淑芳 丁学成 韩理 刘志强 张连水 傅广生 |
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| 作者单位： | 河北大学,物理系,河北,保定,071002;河北大学,物理系,河北,保定,071002;河北大学,物理系,河北,保定,071002;河北大学,物理系,河北,保定,071002;河北大学,物理系,河北,保定,071002;河北大学,物理系,河北,保定,071002;河北大学,物理系,河北,保定,071002 |
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| 基金项目： | 河北省自然科学基金,597058, |
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| 摘 要： | 采用直流辉光放电等离子体增强化学气相沉积(PECVD)技术方法 ,在Si(100)衬底上制备了金刚石薄膜 ,并在此基础上合成了含有少量晶态颗粒的非晶氮化碳薄膜
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| 关 键 词： | 直流辉光放电 化学气相沉积 金刚石 氮化碳 |
| 文章编号： | 1000-1565(2000)01-0078-05 |
| 修稿时间： | 1999-11-21 |
The Synthesis of Diamond and Carbon Nitride by Dc.Glow Discharge Plasma Enhanced Chemical Vapor Deposition |
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| YU Wei,WANG Shu-fang,DING Xue-cheng,HAN Li,LIU Zhi-qiang,ZHANG Lian-shui,FU Guang-sheng. The Synthesis of Diamond and Carbon Nitride by Dc.Glow Discharge Plasma Enhanced Chemical Vapor Deposition[J]. Journal of Hebei University (Natural Science Edition), 2000, 20(1): 78-82 |
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| Authors: | YU Wei WANG Shu-fang DING Xue-cheng HAN Li LIU Zhi-qiang ZHANG Lian-shui FU Guang-sheng |
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| Affiliation: | YU Wei,WANG Shu-fang,DING Xue-cheng,HAN Li,LIU Zhi-qiang,ZHANG Lian-shui(Department of physics,Heibei University,Baoding 071002,China) |
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| Abstract: | Polycrystalline diamond and amorphous carbon nitride films embedded with carbon nitride crystallites have been synthesized on the Si(100) substrate using dc.discharge plasma enhanced chemical deposition.Scanning electron micrographs (SEM),X-ray diffraction (XRD) and Ram an spectroscopy were used to investigate the properties of the deposited films.Together with the experimental results,we suggest that the appropriate substrate temperature and substrate pretreatment using diamond powder are beneficial to the crystalline carbon nitride growth. |
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| Keywords: | dc. glow discharge plasma chemical vapor deposition diamond carbon nitride |
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