| 等离子体源离子注入柱形空心阴极内表面的蒙特-卡罗模拟 |
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| 引用本文： | 孔令宜,张连珠,栗平.等离子体源离子注入柱形空心阴极内表面的蒙特-卡罗模拟[J].山东师范大学学报(自然科学版),2007,22(1):73-75. |
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| 作者姓名： | 孔令宜 张连珠 栗平 |
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| 作者单位： | 河北师范大学物理科学与信息工程学院,050016,石家庄 |
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| 摘 要： | 采用蒙特—卡罗方法对柱形空心阴极的氮离子(N ,N2 )注入进行了研究,考虑了氮离子与中性原子的电荷交换和弹性碰撞,计算了氮离子在不同压强下鞘层内表面的能量分布及角分布.
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| 关 键 词： | 等离子体源离子注入 柱形空心阴极脉冲放电 蒙特卡罗模拟 |
| 修稿时间： | 2006-10-26 |
MONTE CARLO SIMULATION OF IONS INSIDE A CYLINDRICAL BORE FOR PLASMA SOURCE ION IMPLANTATION |
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| Kong Lingyi,Zhang Lianzhu,Li Ping.MONTE CARLO SIMULATION OF IONS INSIDE A CYLINDRICAL BORE FOR PLASMA SOURCE ION IMPLANTATION[J].Journal of Shandong Normal University(Natural Science),2007,22(1):73-75. |
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| Authors: | Kong Lingyi Zhang Lianzhu Li Ping |
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| Institution: | College of Physics, Hebei Normal University,050016, Shijiazhuang, China |
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| Abstract: | The ions(N ,N 2)transport processe at the interior sidewall of a large cylindrical bore is studied by using Monte Carlo simulation.The ion-neutral charge exchange and elastic collision are taken into account.We calculate the energy distribution and angular distribution under different pressure. |
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| Keywords: | monte carlo simulation inside acylindrical bore plasma source ion implantation |
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