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共振光电子及俄歇电子出电势谱复合分析管的研制和应用
引用本文:邵力为,刘洁美,娄维鸿,陈德森.共振光电子及俄歇电子出电势谱复合分析管的研制和应用[J].东南大学学报(自然科学版),1987(1).
作者姓名:邵力为  刘洁美  娄维鸿  陈德森
作者单位:南京工学院电子研究所,南京工学院电子研究所,南京工学院电子研究所,南京工学院电子研究所
摘    要:一、引言共振光电子出现电势谱(RPAPS)的主要特点是对杂质元素的分辨率均优于同样条件下的软x射线出现电势谱(SXAPS)并与二次离子谱仪(SIMS)相妣美,因此它是一种对表面杂质分析相当灵敏的有用的出现电势谱。俄歇电子出现电势谱是芯能级谱中灵敏度最离的一种出现电势谱,而三极式结构的俄歇电子出现电势谱又最适于各种场合和各种类型材料的分析,


The Research and Application of the Compound Tube for Resonat Photoelectron and Auger Electron Appearance Potential Spectroscopy
Shao Liwei,Liu Jeimei,Lou Weihong,Chen Desen.The Research and Application of the Compound Tube for Resonat Photoelectron and Auger Electron Appearance Potential Spectroscopy[J].Journal of Southeast University(Natural Science Edition),1987(1).
Authors:Shao Liwei  Liu Jeimei  Lou Weihong  Chen Desen
Institution:Research Institute of Electronics
Abstract:General principle and application in resonant photoelectron appearance potential spectroscopy and Auger electron appearance potential spectroscopy are introduced. The compound of RPAPS and AEAPS is considered according to the aim of application. Two general structures of compound tube for several meterial analysis are introduced and the analysis result of stain-less steel and evaporatable getter meterial indicates that the compound tube has an applicable value for special purpose and special research of chemical activator, easy to stain and easy to evaporate meterials.
Keywords:appearance potential spectroscopy  surface analysis  Auger electron  
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