Energy and angle distributions of ions striking an inner surface of hemispherical bowl-shaped target in plasma source ion implantation期刊界 All Journals 搜尽天下杂志传播学术成果专业期刊搜索期刊信息化学术搜索

Energy and angle distributions of ions striking an inner surface of hemispherical bowl-shaped target in plasma source ion implantation

Authors:	LIU Cheng-sen WU Xue-fei GAO Xin-xin

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