| 温度对氮活性粒子(N+,Nf)轰击阴极壁的影响 |
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| 引用本文： | 何琪,张连珠,孔令宜.温度对氮活性粒子(N+,Nf)轰击阴极壁的影响[J].河北师范大学学报(自然科学版),2003,27(2):144-146. |
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| 作者姓名： | 何琪 张连珠 孔令宜 |
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| 作者单位： | 河北师范大学,物理学院,河北,石家庄,050016 |
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| 基金项目： | 河北省自然科学基金资助项目(100064) |
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| 摘 要： | 采用蒙特卡罗方法,模拟研究了氮直流辉光放电电子碰撞、离解和N2+电荷交换离解过程,产生的活性粒子(N+,Nf)轰击阴极壁的能量分布随放电气体温度的变化规律.结果表明阴极壁处活性粒子(N+,Nf)的能量最高且粒子数密度最大,最佳放电温度与参数(P,Vc)相关联.模拟结果为等离子体与材料表面的相互作用过程的认识提供了依据.
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| 关 键 词： | 氮直流辉光放电 Monte-Carlo模拟 活性氮粒子 N2+-N2s离解反应 |
| 文章编号： | 1000-5854(2003)02-0144-03 |
| 修稿时间： | 2002年9月2日 |
Effect of Discharge Temperature upon Active Species(N+ , Nf) |
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| HE Qi,ZHANG Lian-zhu,KONG Ling-yi.Effect of Discharge Temperature upon Active Species(N+ , Nf)[J].Journal of Hebei Normal University,2003,27(2):144-146. |
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| Authors: | HE Qi ZHANG Lian-zhu KONG Ling-yi |
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| Abstract: | Law of active species (N+,N f)energy distribution with discharge temperature changing at cathode well of nitrogen glow discharge is studied. It shows that there is an optimum discharge temperature of species (N+,N f) energy distribution at cathode, and the results are compared with the results of experiment. |
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| Keywords: | nitrogen dc glow discharge Monte-Carlo simulation active nitrogen species N 2+-N 2s dissciation reaction |
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