| 高衍射效率金属介质膜光栅的设计及性能分析 |
| |
| 引用本文： | 张文飞,孔伟金,云茂金,孙欣,梁健,席思星,王书浩.高衍射效率金属介质膜光栅的设计及性能分析[J].青岛大学学报(自然科学版),2010,23(4):41-45. |
| |
| 作者姓名： | 张文飞 孔伟金 云茂金 孙欣 梁健 席思星 王书浩 |
| |
| 作者单位： | 青岛大学物理科学学院,山东青岛266071 |
| |
| 基金项目： | 国家自然科学基金，山东省教育厅科技计划项目 |
| |
| 摘 要： | 基于严格耦合波理论,分析了金属介质膜光栅的衍射性能,以-1级衍射效率为评价函数,研究了表面浮雕结构分别为HfO2和Si O2材料的金属介质膜光栅,获得衍射效率优于99%的结构参数。数值计算表明,当顶层光栅结构为HfO2和Si O2的槽深分别为80nm和225 nm时,在1 053 nm处获得接近100%的衍射效率。
|
| 关 键 词： | 金属介质模光栅 耦合波 衍射效率 超短激光脉冲 |
Design and Analysis of High Efficiency Metal-Multi-layer Dielectric Grating |
| |
| ZHANG Wen-fei,KONG Wei-jin,YUN Mao-jin,SUN Xin,LIANG Jian,XI Si-xing,WANG Shu-hao.Design and Analysis of High Efficiency Metal-Multi-layer Dielectric Grating[J].Journal of Qingdao University(Natural Science Edition),2010,23(4):41-45. |
| |
| Authors: | ZHANG Wen-fei KONG Wei-jin YUN Mao-jin SUN Xin LIANG Jian XI Si-xing WANG Shu-hao |
| |
| Institution: | (College of Physics Science,Qingdao University,Qingdao 266071,China) |
| |
| Abstract: | The diffraction characteristic of metal and multi-layer dielectric grating（MMDG） was analyzed with the method of rigorous coupled wave.Taking the-1 order diffraction efficiency above 99% as the merit function,the parameters of MMDG are optimized with the top layer being HfO2 and SiO2,respectively.Numerical calculation shows that the diffraction efficiency can be closed to 100% when the groove depths are 80 nm for HfO2 and 225 nm for SiO2 on the top surface. |
| |
| Keywords: | metal-multi-layer dielectric grating coupled wave diffraction efficiency ultrashort laser pulse |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
|
