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由于常规等离子体刻蚀系统在晶圆边缘处的阻抗与晶圆中心处的阻抗不一致, 使离子在晶圆边缘处的运动轨迹发生偏移, 很难满足越来越高的刻蚀工艺均匀性及深宽比的要求。本文提出一种通过调整晶圆边缘阻抗进行边缘离子运动方向优化的方法, 可以连续实时地调整边缘离子的运动轨迹, 实现对边缘离子运动方向的控制。研究结果表明, 离子的运动方向可以被优化为垂直于晶圆表面, 从而能获得良好的刻蚀速率均匀性及垂直的刻蚀形貌。 相似文献
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汤姆·麦克利什 《科技导报(北京)》2019,37(2):45-47
英国皇家学会(Royal Society)是全球首个科学学会。自1660年起的几百年历史中,它不断促进自然科学的发展,也一直在促进全球的合作,显示科学对每个公众的重要性。英国皇家学会一方面促进了国际合作,特别是与发展中国家合作;另一方面在科学政策制定方面提供支持,为进一步提高科学对社会的益处提供帮助。我们能够参与到学会的工作之中,并不是因为学会卓著的声誉,最重要的是我们确实有很好的机会能够回馈于国家和社会,能够帮助国家和社会,帮助更多的人成为科学家。我们的资金很少一部分用来支持会员,更多是的给那些未来能够成为学会会员的人,给我们的学生,向他们提供支持。 相似文献
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Journal of Systems Science and Complexity - The idea of envelope of a family of plane curves is an elementary notion in differential geometry. As such, its implementation in dynamic geometry... 相似文献
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Bis JC DeCarli C Smith AV van der Lijn F Crivello F Fornage M Debette S Shulman JM Schmidt H Srikanth V Schuur M Yu L Choi SH Sigurdsson S Verhaaren BF DeStefano AL Lambert JC Jack CR Struchalin M Stankovich J Ibrahim-Verbaas CA Fleischman D Zijdenbos A den Heijer T Mazoyer B Coker LH Enzinger C Danoy P Amin N Arfanakis K van Buchem MA de Bruijn RF Beiser A Dufouil C Huang J Cavalieri M Thomson R Niessen WJ Chibnik LB Gislason GK Hofman A Pikula A Amouyel P Freeman KB Phan TG Oostra BA Stein JL 《Nature genetics》2012,44(5):545-551
Aging is associated with reductions in hippocampal volume that are accelerated by Alzheimer's disease and vascular risk factors. Our genome-wide association study (GWAS) of dementia-free persons (n = 9,232) identified 46 SNPs at four loci with P values of <4.0 × 10(-7). In two additional samples (n = 2,318), associations were replicated at 12q14 within MSRB3-WIF1 (discovery and replication; rs17178006; P = 5.3 × 10(-11)) and at 12q24 near HRK-FBXW8 (rs7294919; P = 2.9 × 10(-11)). Remaining associations included one SNP at 2q24 within DPP4 (rs6741949; P = 2.9 × 10(-7)) and nine SNPs at 9p33 within ASTN2 (rs7852872; P = 1.0 × 10(-7)); along with the chromosome 12 associations, these loci were also associated with hippocampal volume (P < 0.05) in a third younger, more heterogeneous sample (n = 7,794). The SNP in ASTN2 also showed suggestive association with decline in cognition in a largely independent sample (n = 1,563). These associations implicate genes related to apoptosis (HRK), development (WIF1), oxidative stress (MSR3B), ubiquitination (FBXW8) and neuronal migration (ASTN2), as well as enzymes targeted by new diabetes medications (DPP4), indicating new genetic influences on hippocampal size and possibly the risk of cognitive decline and dementia. 相似文献
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JP Dietrich N Werner D Clowe A Finoguenov T Kitching L Miller A Simionescu 《Nature》2012,487(7406):202-204
It is a firm prediction of the concordance cold-dark-matter cosmological model that galaxy clusters occur at the intersection of large-scale structure filaments. The thread-like structure of this 'cosmic web' has been traced by galaxy redshift surveys for decades. More recently, the warm–hot intergalactic medium (a sparse plasma with temperatures of 10(5) kelvin to 10(7) kelvin) residing in low-redshift filaments has been observed in emission and absorption. However, a reliable direct detection of the underlying dark-matter skeleton, which should contain more than half of all matter, has remained elusive, because earlier candidates for such detections were either falsified or suffered from low signal-to-noise ratios and unphysical misalignments of dark and luminous matter. Here we report the detection of a dark-matter filament connecting the two main components of the Abell 222/223 supercluster system from its weak gravitational lensing signal, both in a non-parametric mass reconstruction and in parametric model fits. This filament is coincident with an overdensity of galaxies and diffuse, soft-X-ray emission, and contributes a mass comparable to that of an additional galaxy cluster to the total mass of the supercluster. By combining this result with X-ray observations, we can place an upper limit of 0.09 on the hot gas fraction (the mass of X-ray-emitting gas divided by the total mass) in the filament. 相似文献
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Tom Ziemke 《Foundations of Science》2001,6(1-3):163-233
This paper discusses different approaches incognitive science and artificial intelligenceresearch from the perspective of radicalconstructivism, addressing especially theirrelation to the biologically based theories ofvon Uexküll, Piaget as well as Maturana andVarela. In particular recent work in ‘New AI’ and adaptive robotics on situated and embodiedintelligence is examined, and we discuss indetail the role of constructive processes asthe basis of situatedness in both robots andliving organisms. 相似文献
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Tom A. B. Snijders Maarten Dormaar Wijbrandt H. van Schuur Chantal Dijkman-Caes Ger Driessen 《Journal of Classification》1990,7(1):5-31
Parameters are derived of distributions of three coefficients of similarity between pairs (dyads) of operational taxonomic units for multivariate binary data (presence/absence of attributes) under statistical independence. These are applied to test independence for dyadic data. Association among attributes within operational taxonomic units is allowed. It is also permissible for the two units in the dyad to be drawn from different populations having different presence probabilities of attributes. The variance of the distribution of the similarity coefficients under statistical independence is shown to be relatively large in many empirical situations. This result implies that the practical interpretation of these coefficients requires much care. An application using the Jaccard index is given for the assessment of consensus between psychotherapists and their clients.
La distribution des coefficients de similarité pour les données binaires et les attributs associés
Résumé Les paramètres de la distribution de trois coefficients de similarité entre paires d'éléments taxinomiques opérationels de données multivariables binaires (présence/absence) ont été dérivés dans l'hypothèse d'indépendance statistique. Ces paramètres sont utilisés dans un test d'indépendance pour les données dyadiques. L'existence est autorisée, dans la population d'éléments, d'une association entre plusieurs attributs. Il est également permis que les deux éléments de la dyade soient tirés de deux populations différentes, ayant différentes probabilit és quant à la présence des attributs. Dans beaucoup de situations empiriques, la variance des coefficients de similarité peut être relativement élevée dans le cas d'indépendance statistique. Par conséquence, ces coefficients doivent être interprétés avec précaution. Un exemple est donné pour le coefficient de Jaccard, qui a été employé dans une recherche sur la concordance entre des psychothérapeutes et leurs clients.相似文献