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The nanomechanical properties of thin silicon films will become increasingly critical in semiconductor devices, particularly in the context of substrates that consist of a silicon film on an insulating layer (known as silicon-on-insulator, or SOI, substrates). Here we use very small germanium crystals as a new type of nanomechanical stressor to demonstrate a surprising mechanical behaviour of the thin layer of silicon in SOI substrates, and to show that there is a large local reduction in the viscosity of the oxide on which the silicon layer rests. These findings have implications for the use of SOI substrates in nanoelectronic devices.  相似文献   
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Thin-film cliffhanger   总被引:1,自引:0,他引:1  
Lagally MG  Zhang Z 《Nature》2002,417(6892):907-910
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The widely used 'silicon-on-insulator' (SOI) system consists of a layer of single-crystalline silicon supported on a silicon dioxide substrate. When this silicon layer (the template layer) is very thin, the assumption that an effectively infinite number of atoms contributes to its physical properties no longer applies, and new electronic, mechanical and thermodynamic phenomena arise, distinct from those of bulk silicon. The development of unusual electronic properties with decreasing layer thickness is particularly important for silicon microelectronic devices, in which (001)-oriented SOI is often used. Here we show--using scanning tunnelling microscopy, electronic transport measurements, and theory--that electronic conduction in thin SOI(001) is determined not by bulk dopants but by the interaction of surface or interface electronic energy levels with the 'bulk' band structure of the thin silicon template layer. This interaction enables high-mobility carrier conduction in nanometre-scale SOI; conduction in even the thinnest membranes or layers of Si(001) is therefore possible, independent of any considerations of bulk doping, provided that the proper surface or interface states are available to enable the thermal excitation of 'bulk' carriers in the silicon layer.  相似文献   
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Synthesis, assembly and applications of semiconductor nanomembranes   总被引:1,自引:0,他引:1  
Rogers JA  Lagally MG  Nuzzo RG 《Nature》2011,477(7362):45-53
Research in electronic nanomaterials, historically dominated by studies of nanocrystals/fullerenes and nanowires/nanotubes, now incorporates a growing focus on sheets with nanoscale thicknesses, referred to as nanomembranes. Such materials have practical appeal because their two-dimensional geometries facilitate integration into devices, with realistic pathways to manufacturing. Recent advances in synthesis provide access to nanomembranes with extraordinary properties in a variety of configurations, some of which exploit quantum and other size-dependent effects. This progress, together with emerging methods for deterministic assembly, leads to compelling opportunities for research, from basic studies of two-dimensional physics to the development of applications of heterogeneous electronics.  相似文献   
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