基于Petri网的分层半导体制造过程调度结构

针对复杂的半导体制造过程调度，在综述现有调度问题及方法的基础上，提出由投料调度、路径调度和两种类型的工件调度共同组成的分层调度结构的思想及方案，继而基于Petri订网模型，探讨所提出的分层半导体调度结构基于Petri网模型的实现方法，最后通过仿真对分层调度结构加以应用验证，并总结全文．     

基于微粒群算法的半导体炉管区调度应用研究

提出了用微粒群算法来解决半导体炉管区的调度问题.给出了算法的具体过程及参数设置方案.实例计算的结果表明,该算法是解决半导体炉管区调度问题可行且高效的方法.     

纳米TiO2光催化剂负载化研究进展

纳米TiO2在废水处理、空气净化等方面有着很好的应用前景．将其负载化是在纳米TiO2光催化氧化法的实用化过程中需要解决的关键问题之一．对近年来纳米TiO2光催化剂负载化包括载体、负载方法及影响负载催化剂催化活性的因素的研究进行了综述．     

TaAgN复合膜显微结构、力学性能和摩擦性能的研究

采用非平衡反应磁控溅射法制备了TaAgN复合膜。利用X射线衍射仪、CSM纳米压痕测试仪和摩擦磨损测试了复合膜的显微结构、力学性能和摩擦性能。结果显示,TaAgN复合膜由面心立方结构的TaN相和底心斜方结构的Ta₄N相组成。随着Ag靶功率的增加,硬度H、弹性模量E、弹性恢复W_e和H³/E²值均呈先升高后降低的趋势,最大值分别为34 GPa,394 GPa,57%和250 MPa。随着Ag靶功率的增加,TaAgN复合膜室温下的平均摩擦因数呈降低趋势。当Ag靶功率为25 W时,随着温度的升高,TaAgN复合膜的平均摩擦因数逐渐减小。     

An effective estimation of distribution algorithm for parallel litho machine scheduling with reticle constraints

In order to improve the scheduling efficiency of photolithography, bottleneck process of wafer fabrications in the semiconductor industry, an effective estimation of distribution algorithm is pro-posed for scheduling problems of parallel litho machines with reticle constraints, where multiple reti-cles are available for each reticle type.First, the scheduling problem domain of parallel litho ma-chines is described with reticle constraints and mathematical programming formulations are put for-ward with the objective of minimizing total weighted completion time.Second, estimation of distribu-tion algorithm is developed with a decoding scheme specially designed to deal with the reticle con-straints.Third, an insert-based local search with the first move strategy is introduced to enhance the local exploitation ability of the algorithm.Finally, simulation experiments and analysis demonstrate the effectiveness of the proposed algorithm.     

树叶状CuO微结构:低温水浴合成、影响因素和光催化降解性能

以CuCl2·2H2O和NaOH为起始反应物,在没有任何表面活性剂或模板的辅助下,于80℃的水浴中恒温60 min,快速合成了树叶状的CuO微结构.利用X-射线粉末衍射仪和场发射的扫描电子显微镜对所得产物的物相和形貌进行了系统的表征,并调查了起始反应物的摩尔比、反应的温度和时间等实验参数对最终产物形貌的影响.实验显示,所得的树叶状的CuO微结构在365nm的紫外光的照射下具有强烈的促进有机小分子降解的能力.这在环境治理与防护领域有潜在的应用.     

Improved acetone sensing properties of flat sensors based on Co-SnO2 composite nanofibers

Co-SnO2 composite nanofibers were synthesized by an electrospinning method and characterized by X-ray diffraction, field emission scanning electron microscopy, and transmission electron microscopy. Gas sensors were fabricated by spinning these nanofibers onto flat ceramic substrates, which had signal electrodes and heaters on their top and bottom surfaces, respectively. Compared with sensors loaded with pure SnO2 nanofibers, the Co-SnO2 nanofiber sensors exhibited improved acetone sensing properties with high selectivity and rapid response and recovery times. The response was 33 when the sensors were exposed to 100 μL/L acetone at 330°C, and the corresponding response with 100 μL/L of ethanol was only 6. The response and recovery times to acetone were about 5 and 8 s, respectively. These results indicate Co-SnO2 composite nanofibers are good candidates for fabrication of high performance acetone sensors for practical application.     

纳米YAG粉体的制备与表征

以Y(NO3)3·6H2O、Al( NO3)3·9H2O、Nd(NO3)3·6H2O、NH4HCO3为原料,以乙醇为分散剂,采用共沉淀法制备Nd:YAG前躯体,将前躯体在不同温度下煅烧得到Nd:YAG粉体.分别采用红外光谱仪(FT-IR)、热重/差热分析仪(TG/DSC)、X射线衍射仪(XRD)、透射电子显微镜(TEM...     

鲁棒的高速物理随机数发生器

基于宽带混沌激光作为物理熵源, 提出一个性能稳定的高速物理随机数发生器实现方案. 利用差分比较器对宽带混沌信号延迟作差, 再经由时钟控制的触发器进行采样保持以及后续异或处理, 实验获得了速率为1.44 Gbit/s 的随机数. 该方案免去了精确的阈值电压调节过程, 利用差分比较纠正了混沌幅值概率密度分布的偏差, 使混沌幅值分布的中值偏斜度系数为γ= 1.5×10^-6. 此实验系统可抗外界波动信号的干扰, 能够连续稳定工作至少12 h.     

有机半导体异质结电荷产生层及其在叠层有机发光二极管中的应用

叠层有机发光二极管因其具有更高的亮度、效率以及稳定性, 其研究备受关注.本文综述了叠层有机发光二极管的最新进展; 总结了作者研究小组基于有机半导体异质结的概念, 设计了由一种p 型有机半导体和一种n 型有机半导体层层组成的双层有机半导体异质结电荷产生层, 并用它们作为连接单元制备了叠层有机发光二极管, 器件的电压得到了降低, 功率效率得到了提高. 通过对电荷产生层的工作机制的深入剖析, 揭示了降低电压、提高功率效率的内在物理原因, 为进一步设计高性能有机电致发光器件提供了新的思路; 最后对叠层有机发光二极管的未来发展方向进行了展望.