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1.
利用磁控溅射方法,采用不同成分的ZrSi复合靶,在单晶硅基底片上沉积不同Si含量的ZrSiN纳米复合膜.利用X射线衍射仪(XRD)、扫描电子显微镜(SEM)、高分辨透射电子显微镜(HRTEM)和纳米压痕仪等表征测试方法研究了Si含量对ZrSiN纳米复合膜微观结构和力学性能的影响.结果表明:随着ZrSiN薄膜中Si含量的增加,薄膜结晶程度先升高后降低,同时薄膜硬度和弹性模量先上升后下降;当Si与Zr的原子比为1∶24时,ZrSiN薄膜的硬度和弹性模量达到最大值31.6 GPa和320.6 GPa,此时ZrSiN薄膜内部形成Si3N4界面相包裹ZrN纳米晶粒的纳米复合结构;Si3N4界面相呈结晶态协调邻近ZrN纳米晶粒间的位向差,并与ZrN纳米晶粒之间形成共格外延生长,表明ZrSiN纳米复合膜的强化来源于ZrN纳米晶粒和Si3N4界面相之间形成共格外延生长界面.  相似文献   

2.
通过射频磁控溅射在单晶硅(111)和硬质合金衬底上制备Si掺杂的TiSiN纳米复合涂层。采用双靶溅射技术,保持Ti靶功率不变,改变Si靶的功率以获得Si含量不同的TiSiN纳米复合涂层。用X射线衍射仪(XRD)、扫描电子显微镜(SEM)和显微硬度计表征TiSiN涂层的结构、成分、形貌和硬度。研究结果表明,Si靶溅射功率对TiSiN涂层的结构和力学性能影响较大。随着Si靶溅射功率的增加,TiN晶粒特征峰由(111)向(200)转变,在20 W的Si靶溅射功率下(111)面取向最优。涂层厚度随着功率的增大呈现先增大后减小的趋势。Si以非晶相Si_3N_4的形式存在;随着Si含量的增加表面晶粒得到细化,在20 W的Si靶溅射功率下,涂层晶体生长致密光滑,涂层硬度高达2 600 HV。  相似文献   

3.
采用非平衡反应磁控溅射法制备了TaAgN复合膜。利用X射线衍射仪、CSM纳米压痕测试仪和摩擦磨损测试了复合膜的显微结构、力学性能和摩擦性能。结果显示,TaAgN复合膜由面心立方结构的TaN相和底心斜方结构的Ta4N相组成。随着Ag靶功率的增加,硬度H、弹性模量E、弹性恢复WeH3/E2值均呈先升高后降低的趋势,最大值分别为34 GPa,394 GPa,57%和250 MPa。随着Ag靶功率的增加,TaAgN复合膜室温下的平均摩擦因数呈降低趋势。当Ag靶功率为25 W时,随着温度的升高,TaAgN复合膜的平均摩擦因数逐渐减小。  相似文献   

4.
Si含量和基片温度对Ti-Si-N纳米复合薄膜的影响   总被引:8,自引:1,他引:8  
通过多靶磁控反应溅射方法沉积了Ti-Si-N系纳米复合薄膜。采用电子能谱仪(EDS)、X-射线衍射(SRD)、透射电子显微镜(TEM)、X-射线光电子能谱(XPS)和显微硬度仪分析Ti-Si-N系薄膜的微观结构和力学性能,以及基片温度对薄膜微结构和硬度的影响。结果表明,薄膜中的Si以非晶Si3N4形式抑制TiN晶粒的生长,使之形成纳米晶甚至非晶;薄膜硬度在a(Si)=4.14%时达到最大值(36GPa),继续增加Si的含量,薄膜硬度逐渐降低。基片温度的提高减弱了Si3N4对TiN晶粒长大的抑制作用,因而高的沉积温度使薄膜呈现出硬度峰值略低和硬度降幅减缓的特征。  相似文献   

5.
研究了合金中Al含量的增加对铸态FeNiMnCr0.75Alxx=0.25,0.5,0.75,原子分数)高熵合金晶体结构及力学性能的影响。采用X射线衍射仪(XRD)和透射电子显微镜(TEM)对合金的微观结构及形貌进行分析,采用维氏硬度计和MTS万能试验机测试合金的硬度和室温压缩性能。试验结果表明,铸态下,FeNiMnCr0.75Alx高熵合金均由bcc和fcc两种晶体结构的相构成。随着Al含量的增加,合金中bcc结构的相的相对含量逐渐增加,导致硬度和压缩屈服强度也随之升高,应变量降低;且Al含量的增加最终也促使合金中无序bcc结构的相逐渐转变为Ni:(Mn+Al)=1:1(原子分数比)型有序bcc结构的相。  相似文献   

6.
通过磁控溅射的方法,使用石墨靶、V靶复合拼接靶,以氩气作为辅助气体,成功制备了不同原子分数的V掺杂类金刚石薄膜。采用拉曼光谱仪、电子探针X射线显微分析仪、X射线光电子能谱仪、原子力显微镜、扫描电子显微镜、纳米压痕仪、薄膜应力仪、往复摩擦磨损试验机等设备研究了V掺杂对类金刚石薄膜微观结构、力学性能、摩擦学性能的影响。结果表明,V掺杂提高了类金刚石薄膜的力学性能,当薄膜中V的原子分数为54.28%时,薄膜的硬度和弹性模量分别为14.1 GPa和147.6 GPa。掺杂V后,薄膜中生成了V2O5,降低了薄膜的耐磨性能。这主要是因为V促进了sp3杂化C数量的增加,并且在摩擦过程中,薄膜中的sp3杂化C的数量进一步增加,导致其硬度升高,耐磨性能下降。  相似文献   

7.
研究了一种新型pH响应纳米容器,采用“一锅法”合成了氨基化介孔二氧化硅(SiO2)棒状纳米粒子,并将苯并三唑(BTA)嵌入其中.通过装有纳米粒子的环氧树脂涂覆Q235碳钢基板来评估涂层的防腐蚀效果.电化学阻抗谱显示:与对照组相比,负载BTA的氨基化介孔SiO2的涂层具有明显的长效防腐蚀行为.  相似文献   

8.
研究铜基预处理工艺过程中不同除油温度和酸洗时间对Ni-P-PTFE复合涂层的微观结构和力学性能的影响.首先对H70黄铜进行不同工艺的预处理,然后在基体上先镀Ni-P层,最后化学镀Ni-P-PTFE复合涂层.通过控制预处理过程中除油温度和酸洗时间,利用扫描电子显微镜(SEM)、X射线衍射仪(XRD)、纳米压痕仪和HSR-2M摩擦磨损试验机对涂层的微观结构和力学性能进行表征和测试.结果表明:不同除油温度和酸洗时间对Ni-P-PTFE复合涂层的微观组织、涂层硬度和摩擦因数均有较大的影响.当除油温度为70℃、酸洗时间为4 min时,可在基材上得到润滑性和硬度等综合性能优良的Ni-P-PTFE复合涂层,涂层硬度达到5.16 GPa,摩擦因数为0.135.  相似文献   

9.
采用液固掺杂技术将不同含量的KOH,H2SiO3和Al(NO33·9H2O溶液加入到MoO2粉末中,并通过还原、压制和烧结工艺制备成钼棒。研究了掺杂钼粉的平均费氏粒度、松装密度与掺杂量的关系,采用扫描电子显微镜(SEM)对掺杂钼粉的表面形貌及烧结钼棒的断口形貌进行了分析。研究结果表明,随着K,Al和Si掺杂量的提高,钼粉的粒度及松装密度均呈先减小后增大的变化趋势,且钼棒晶粒中的气孔呈增多趋势。通过SEM分析发现,由于K,Al和Si的掺杂,烧结钼棒的断裂形貌由沿晶断裂逐渐向穿晶断裂转变。综合比较后认为,Mo-0.005Al-0.27K-0.098Si和Mo-0.005Al-0.36K-0.1305Si为最优配方。  相似文献   

10.
开展了不同热处理状态下U-2.5wt% Nb (U-2.5Nb)合金的静动态力学性能实验,利用金相显微镜、X射线衍射、扫描电镜等手段研究了淬火温度对U-2.5Nb合金显微组织结构的影响.结果表明:随着淬火温度(800℃至620℃)不断降低,U-2.5Nb合金的显微组织和相结构发生显著变化,由含铌的过饱和α''单相斜方结构过渡为α+γ2双相结构.强度随淬火温度降低而下降,而塑性显著增加.压缩载荷下,655℃(α+γ1双相)快速淬火处理后的屈服强度最低,这可能是由于γ1相是富铌相,该温度下快速淬火的组织中α″相较高所导致的.  相似文献   

11.
TiAlSiN hard coatings were synthesized on high-speed steel using an arc ion enhanced magnetic sputtering hybrid system.The microstructure and hardness of the coatings at different annealing temperatures were explored by means of XRD,TEM,EDAX and Vickers indentation.The as-deposited TiAlSiN coatings were confirmed to be amorphous due to high depositing rate and low deposition temperature during the film growth.The transformation from amorphous to nanocomposites of nano-crystallites and amorphousness were observed after the annealing treatment,the microstructure of TiAlSiN coatings annealed at 800°C and 1000°C were consisted of crystalline hcp-AlN,fcc-TiN and amorphous phase,however,the coatings were only consisted of fcc-TiN and amorphous phase when annealing at 1100°C and 1200°C.Meanwhile,the formation of Al2O3 was detected on the coating surface after annealing at 1200°C and it indicated the excellent oxidation resistance of the TiAlSiN coatings under the present experimental conditions.Furthermore,the average grain size of the TiAlSiN coatings after high temperature annealing even at 1200°C was less than 30 nm and the size increased with the increasing temperature.However,the hardness of the so-deposited coatings with HV0.2N=3300 dramatically decreased with the increase of temperature and reached nearly to the hardness of TiN coatings with HV0.2N=2300.  相似文献   

12.
为预防种植体周围炎,采用反应磁控溅射法在纯Ti片表面制备了Ti-TiO2纳米复合涂层,改变Ti靶材与TiO2靶材的拼接比例,研究纳米TiO2体积分数对涂层微观结构和抗菌性能的影响。采用扫描电子显微镜、能谱仪、X射线衍射仪、原子力显微镜、接触角测量仪对样品进行微观组织的表征以及表面粗糙度和润湿性能的测量,采用CCK-8法(cell counting kit-8,CCK-8)对涂层进行细胞毒性测试,采用平板涂布计数法对涂层进行抗菌性能评价。结果表明,当Ti靶材与TiO2靶材的拼接比例为95∶5时,Ti-TiO2涂层含纳米TiO2量最多,涂层的表面粗糙度以及与液相接触角达到最大值,分别为1.28 nm和100.42°,涂层无细胞毒性,符合生物安全性材料的标准,涂层的抗菌性能最佳,涂层的抑菌率达到了90.94%。  相似文献   

13.
直流磁控溅射Ti-Si-N 超硬纳米复合膜的结构与力学性能   总被引:1,自引:0,他引:1  
采用Ti-Si复合靶在321不锈钢基体上用直流磁控反应溅射方法制得超硬纳米复合Ti-Si-N膜层,并借助能谱仪(EDX)、X射线衍射(XRD)、X光电子谱(XPS)、原子力显微镜(AFM)、纳米压入仪和划痕仪对膜层的成分、结构和力学性能进行了分析.结果表明:随着膜层中Si含量的增加,Ti-Si-N膜的硬度逐渐升高,当a(Si)=11.2%时达到峰值42 GPa;随着Si含量的进一步增长,膜层硬度开始下降.XRD和XPS结果显示,最硬的Ti-Si-N膜层包含大小约为8 nm的TiN纳米晶以及包围在其周围的非晶态Si3N4.XRD结果显示,随着Si的引入,膜层中TiN晶粒的择优取向由纯TiN膜层中的(111)变为Ti-Si-N膜层中的(200).划痕实验也显示了Si的添加对膜层结合力的影响.最后对该纳米复合膜的强化机制进行了探讨.  相似文献   

14.
To investigate the change of the mechanical properties of soft metals doped PVD(Physical Vapor Deposition)coatings after the migration of soft metal to the surface, TiN-Cu coating was deposited on Si(100) by magnetron sputtering. The microstructure and mechanical properties at room temperature and after vacuum heat treatment at 300 ℃ were investigated. The results showed that the grains were clustered and the microstructure was porous for TiN-Cu coating at room temperature, while many micro-and nano-sized Cu particles were observed on the surface after vacuum heat treatment at 300 ℃. The elastic properties of the TiN-Cu coating after vacuum heat treatment at 300℃ degraded compared with that at room temperature. The hardness and elasticity modulus of TiN-Cu coating kept constant(3.7 GPa and 125.0 GPa, respectively) with the increase of nano-indentation depth, while the hardness and elasticity modulus of TiN-Cu coating after vacuum heat treatment at 300 ℃ increased gradually.  相似文献   

15.
单极性脉冲电流密度对铝合金MAO膜相结构和微结构的影响   总被引:5,自引:1,他引:5  
利用微弧氧化(MAO)技术在铝合金表面沉积陶瓷膜, 采用X射线衍射仪(XRD), 扫描电子显微镜(SEM), 电子能谱(EDS)和显微硬度方法, 研究了MAO过程中单极性脉冲电流密度与氧化膜力学性能和化学成分的关系. 发现在较高电流密度下制备的陶瓷膜中含有较多的α-Al2O3相, 而在较低电流密度下制备的陶瓷膜主要由γ-Al2O3相组成. 对陶瓷膜截面上不同厚度处的膜层化学成分分析表明, 组成氧化膜的主要物质α-Al2O3和γ-Al2O3的比例随深度的变化呈现出复杂的变化规律, 这一结果与相关的文献报道有所不同.  相似文献   

16.
TiO2-hydroxyapatite (HA) nanostructured coatings were produced by atmospheric plasma spray method. The effects of starting powder composition and grain size on their mechanical properties were investigated. The microstructure and morphology were characterized by X-ray diffraction and scanning electron microscopy (SEM). It is found that the coating with 10% HA has the best mechanical properties. Based on Rietveld refinement method, the mean grain size of the as-received powder (212 nm) extensively decreases to 66.4 nm after 20 h of high-energy ball milling. In spite of grain growth, the deposited coatings maintain their nanostructures with the mean grain size of 112 nm. SEM images show that there is a lower porosity in the coating with a higher HA content. Optical microscopy images show that uniform thickness is obtained for all the coatings.  相似文献   

17.
以钽氮化物为个体层材料,利用FJL560CI2型超高真空射频磁控与离子束联合溅射系统,制备以TaN和金属Ta为靶材的两种TaN单层薄膜.通过XRD和纳米力学测试系统分析它们的晶体结构和TaN靶材对薄膜机械性能的影响.结果表明,TaN靶材制备的TaN单层膜的纳米硬度值普遍高于Ta靶材的;当工作气压为0.4 Pa时,TaN单层膜的硬度最大,即35.4 GPa,其结晶出现多元化,使单层膜的硬度、弹性模量以及膜基结合性能均达到最佳.  相似文献   

18.
Multi-hierarchical Mo-12Si-8.5B-x Zr B_2(x=0,0.5,1.0,1.5,2.5 wt%)alloys consisting of three ultrafine-grained(UFG,0.47–0.81μm)phases of Mo_5Si B_2(T2),Mo_3Si and Mo solid solution(α-Mo)were prepared by mechanical alloying following hot pressing.Microstructure observations showed that the intermetallic phases(Mo_3Si and T2)distributed dispersedly in the continuousα-Mo matrix associated with the homogeneously embedded nanoscaled particles(10–225 nm)in the grain interiors and at the grain boundaries.The Mo-12Si-8.5B-x Zr B_2alloys exhibited monotonically increasing compressive strength to 3.13 GPa with increasing content of Zr B_2,and the fracture toughness increased about 27%and reached at 11.5 MPa m~(1/2)at 1.0 wt%Zr B_2,rendering the Mo-12Si-8.5B-1.0 wt%Zr B_2alloy possessing the best combined mechanical properties of high strength and high toughness.The underlying reason for the superior mechanical properties of the Mo-12Si-8.5B-x Zr B_2alloys is that the dispersedly distributed nanosized particles in the UFG multi-phased-matrix can not only effectively block the dislocation motion to increase the strength but also store the dislocations to increase the strain hardening ability during mechanical deformation.  相似文献   

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