贝尔实验室半导体器件的研制

叙述了贝尔实验室有关半导体器件的研制工作，主要论述了早期半导体器件的开发，点接触晶体管和结型晶体管，场效应晶体管（ＦＥＴ），发光二极管（ＬＥＤｓ），里德二极管（ＩＭＰＡＴＴ），以及光生伏打电池等     

Enhancing semiconductor device performance using ordered dopant arrays

As the size of semiconductor devices continues to shrink, the normally random distribution of the individual dopant atoms within the semiconductor becomes a critical factor in determining device performance--homogeneity can no longer be assumed. Here we report the fabrication of semiconductor devices in which both the number and position of the dopant atoms are precisely controlled. To achieve this, we make use of a recently developed single-ion implantation technique, which enables us to implant dopant ions one-by-one into a fine semiconductor region until the desired number is reached. Electrical measurements of the resulting transistors reveal that device-to-device fluctuations in the threshold voltage (Vth; the turn-on voltage of the device) are less for those structures with ordered dopant arrays than for those with conventional random doping. We also find that the devices with ordered dopant arrays exhibit a shift in Vth, relative to the undoped semiconductor, that is twice that for a random dopant distribution (- 0.4 V versus -0.2 V); we attribute this to the uniformity of electrostatic potential in the conducting channel region due to the ordered distribution of dopant atoms. Our results therefore serve to highlight the improvements in device performance that can be achieved through atomic-scale control of the doping process. Furthermore, ordered dopant arrays of this type may enhance the prospects for realizing silicon-based solid-state quantum computers.     

有机薄膜光敏三极管动态特性及其应用

为研究试制的有机半导体酞菁铜薄膜静电感应光敏三极管的动态特性,采用电阻分压的方法检测对方波信号的响应速度,测定上升时间为268.1ns.根据所测得的参数,建立了该三极管的微变等效电路,并对参数对器件工作的影响进行了分析.结果证明该器件可以在大面积图像感光传感器中使用,并根据其光敏特性和动态特性,提出了图像感光阵列的设计方法和工作原理.     

基于SQ2染料与P3HT的固态染料敏化太阳能电池

将近红外吸收染料SQ2与可见光吸收空穴传输材料P3HT结合起来制备固态染料敏化太阳能电池,并用锂盐对TiO2/SQ2表面进行处理来调节器件的光伏性能.通过模拟太阳光照射测试和单色光量子转换效率(IPCE)测试来研究器件的光电性能.测试结果表明,经过锂盐处理后,器件的短路电流(JSC)、填充因子(FF)和转换效率都获得提升.IPCE测试显示,经过锂盐处理后器件在P3HT吸收光谱范围内产生的量子效率没有变化,但在SQ2吸收光谱范围内产生的量子效率明显提升.通过分析得出结论是：锂盐处理不能提高P3HT所吸收的光量子转换效率,但可以提升SQ2染料所吸收的光量子转换效率,进而提高了固态染料敏化太阳能电池的光电转换效率.     

半导体致冷材料热传导率的测量

本文提出测量半导体致冷材料热传导率k的一种简便而实用的方法。利用G_e晶体管芯在吸收电功率P_c后,转换为热量Q.使结温上升。因此可把G_e管芯作为测试用的热源,同时,利用管芯的V_(BE)——T特性在较宽的温度范围内近似线性的特点,可以较方便、准确地测出热源的温度,进而得出材料的热传导率。这种测试方法所需装置较简单,操作较方便,重复性较好,具有一定的测量精度,适宜研制或生产材料过程的常规测量。     

Label-free immunodetection with CMOS-compatible semiconducting nanowires

Semiconducting nanowires have the potential to function as highly sensitive and selective sensors for the label-free detection of low concentrations of pathogenic microorganisms. Successful solution-phase nanowire sensing has been demonstrated for ions, small molecules, proteins, DNA and viruses; however, 'bottom-up' nanowires (or similarly configured carbon nanotubes) used for these demonstrations require hybrid fabrication schemes, which result in severe integration issues that have hindered widespread application. Alternative 'top-down' fabrication methods of nanowire-like devices produce disappointing performance because of process-induced material and device degradation. Here we report an approach that uses complementary metal oxide semiconductor (CMOS) field effect transistor compatible technology and hence demonstrate the specific label-free detection of below 100 femtomolar concentrations of antibodies as well as real-time monitoring of the cellular immune response. This approach eliminates the need for hybrid methods and enables system-scale integration of these sensors with signal processing and information systems. Additionally, the ability to monitor antibody binding and sense the cellular immune response in real time with readily available technology should facilitate widespread diagnostic applications.     

A novel lambda negative-resistance transistor in the 0.5 μm standard CMOS process

A novel negative-resistance transistor (NRT) with a Lambda shaped I-V characteristic is demonstrated in the 0.5 μm standard CMOS process. To save on the number of component devices, this device does not use standard device models provided by CMOS processes, but changes a MOSFET and a BJT into a single device by fabricating them in the same n-well, with a p-type base layer as the MOSFET’s substrate. The NRT has a low valley current of -6.82 nA and a very high peak-to-valley current ratio of 3591. The peak current of the device is -24.49 μA which is low enough to reduce the power consumption of the deivce, and the average value of its negative resistance is about 32 kΩ. Unlike most negative-resistance devices which have been fabricated on compound semiconductor substrates in recent years, this novel NRT is based on a silicon substrate, compatible with mainstream CMOS technology. Our NRT dramatically reduces the number of devices, minimizing the area of the chip, has a low power consumption and thus a further reduction in cost.     

槽栅结构SiC材料IGBT的仿真及优化分析

运用半导体物理理论和功率器件模拟软件（SILVACO-TCAD）,研究了新型宽禁带材料SiC槽栅结构IGBT功率半导体器件的电学特性,模拟了不同厚度和掺杂浓度漂移层和缓冲层的IGBT器件的阈值电压、开关特性和导通特性曲线,并分析了漂移层和缓冲层厚度及掺杂浓度对电学特性的影响。结果表明,当SiC-IGBT功率器件漂移层和缓冲层厚度分别为65 μm和2.5 μm,掺杂浓度分别为1×10¹⁵和5×10¹⁵cm^-3时,得到击穿电压为3400 V,阈值电压为8 V。     

4H-SiC功率肖特基二极管可靠性研究进展

 4H-SiC功率器件作为一种宽禁带半导体器件，凭借突出的材料优势具有耐压高、导通电阻低、散热好等优势。近年来随着器件的逐步商用，器件的可靠性问题成为新的研究热点。综述了本课题组近期在4H-SiC功率二极管可靠性方面的研究进展，通过高温存储和高压反偏可靠性问题的研究，分析了器件性能退化机制。通过重复雪崩可靠性问题的研究，提出了一种可有效提升器件抗重复雪崩能力的终端方案。     

Amplifying quantum signals with the single-electron transistor

Transistors have continuously reduced in size and increased in switching speed since their invention in 1947. The exponential pace of transistor evolution has led to a revolution in information acquisition, processing and communication technologies. And reigning over most digital applications is a single device structure--the field-effect transistor (FET). But as device dimensions approach the nanometre scale, quantum effects become increasingly important for device operation, and conceptually new transistor structures may need to be adopted. A notable example of such a structure is the single-electron transistor, or SET. Although it is unlikely that SETs will replace FETs in conventional electronics, they should prove useful in ultra-low-noise analog applications. Moreover, because it is not affected by the same technological limitations as the FET, the SET can approach closely the quantum limit of sensitivity. It might also be a useful read-out device for a solid-state quantum computer.     

Preparation and characteristics of flexible all-organic thin-film field-effect transistor

Much attention has been attracted to organic thin-film field-effect transistors (OTFFETs) in the past decades[1—4]. Because of their lower cost and easier preparation, OTFFETs are considered to be useful in driving liquid crystal displays (LCD) and organic light-emitting diodes (OLED). Furthermore, flexible OTFFETs will be one of the most useful electronic devices for flexible active matrix driving circuits. OTFFETs based on pentacene single crystal have been reported to be of g…     

ESD对微波半导体器件损伤的物理机理分析

为了得到电磁脉冲对微波半导体器件的损伤规律,进而研究器件的静电放电损伤机理,首先对半导体器件静电放电的失效模式即明显失效和潜在性失效进行了介绍;其次分析了器件ESD损伤模型;最后通过对器件烧毁的物理机理进行分析,得到器件在静电放电应力下内在损伤原因。在ESD电磁脉冲作用下,器件会产生击穿效应,使内部电流密度、电场强度增大,导致温度升高,最终造成微波半导体器件的烧毁。     

Preparation of organic thin-film field effect transistor

The organic thin-film field effect transistor was prepared through vacuum deposition by using teflon as di-electric material. Indium-tin-oxide acted as the source and drain electrodes. Copper phthalocyanine and teflon were used as the semiconductor layer and dielectric layer, respectively. The gate electrode was made of Ag. The channel length between the source and drain was 50 μm. After preparing the source and drain electrodes by lithography, the copper phthalocyanine layer, teflon layer and Ag layerwere prepared by vacuum deposition sequentially. The field effect electron mobility of the device reached 1.1×10ˉ6 cm2/(V@s), and the on/off current ratio reached 500.     

MOS晶体管模型参数提取的实验方法探讨

基于CMOS（互补金属氧化物半导体）的集成电路设计在当今集成电路设计中占有很大的比重,MOS晶体管作为CMOS集成电路中最基本的元件之一,其参数的提取在计算机辅助分析中是不可缺少的关键环节之一。文章详细讨论了MOS晶体管众多参数提取的理论基础和实验方法,通过该实验方法的学习和应用,可以使学生对MOS晶体管有更深的认识,同时也对CMOS集成电路设计打下扎实的基础。     

功率半导体器件终端SIPOS/PI复合钝化结构研究

本文采用直流辉光放电法在台面功率半导体器件上生长SIPOS钝化膜.研究结果表明,SIPOS钝化的功率器件性能要好于聚酰亚胺钝化的功率器件,可以有效地提高功率器件的可靠性.基于此提出了SIPOS/PI复合钝化结构来改善台面功率半导体器件的表面特性.     

无结晶体管的研究现状及展望

晶体管是电子设备的关键器件,对电子设备的性能起到很大的作用.现有的晶体管主要是由引入掺杂原子到半导体材料中形成半导体结构成.而无结晶体管是源极、漏极、沟道共用一根纳米线,没有形成传统的源极结和漏极结,因此简化了制作工艺,降低了制作成本.本文主要论述了无结晶体管的发展历史、工作原理、主要性能和分类,并对无结晶体管的应用进行了展望.     

Efficient organic photovoltaic diodes based on doped pentacene

Recent work on solar cells based on interpenetrating polymer networks and solid-state dye-sensitized devices shows that efficient solar-energy conversion is possible using organic materials. Further, it has been demonstrated that the performance of photovoltaic devices based on small molecules can be effectively enhanced by doping the organic material with electron-accepting molecules. But as inorganic solar cells show much higher efficiencies, well above 15 per cent, the practical utility of organic-based cells will require their fabrication by lower-cost techniques, ideally on flexible substrates. Here we demonstrate efficiency enhancement by molecular doping in Schottky-type photovoltaic diodes based on pentacene--an organic semiconductor that has received much attention as a promising material for organic thin-film transistors, but relatively little attention for use in photovoltaic devices. The incorporation of the dopant improves the internal quantum efficiency by more than five orders of magnitude and yields an external energy conversion efficiency as high as 2.4 per cent for a standard solar spectrum. Thin-film devices based on doped pentacene therefore appear promising for the production of efficient 'plastic' solar cells.     

铁电场效应晶体管:原理、材料设计与研究进展

系统阐述了铁电场效应晶体管(FeFET)的工作原理，重点介绍了铁电层和缓冲层的材料设计的基本原理、目前所研究的主要的铁电层材料和缓冲层材料及其所对应的FeFET的器件性能．并介绍了关于FeFET研究的一些最新的进展如基于FeFET的FeCMOS逻辑电路、FeNAND闪存电路、基于氧化物半导体和有机半导体的FeFET的一些最新研究成果．最后对FeFET的未来研究发展趋势作出一些展望．     

A photovoltaic device structure based on internal electron emission

There has been an active search for cost-effective photovoltaic devices since the development of the first solar cells in the 1950s (refs 1-3). In conventional solid-state solar cells, electron-hole pairs are created by light absorption in a semiconductor, with charge separation and collection accomplished under the influence of electric fields within the semiconductor. Here we report a multilayer photovoltaic device structure in which photon absorption instead occurs in photoreceptors deposited on the surface of an ultrathin metal-semiconductor junction Schottky diode. Photoexcited electrons are transferred to the metal and travel ballistically to--and over--the Schottky barrier, so providing the photocurrent output. Low-energy (approximately 1 eV) electrons have surprisingly long ballistic path lengths in noble metals, allowing a large fraction of the electrons to be collected. Unlike conventional cells, the semiconductor in this device serves only for majority charge transport and separation. Devices fabricated using a fluorescein photoreceptor on an Au/TiO2/Ti multilayer structure had typical open-circuit photovoltages of 600-800 mV and short-circuit photocurrents of 10-18 micro A cm(-2) under 100 mW cm(-2) visible band illumination: the internal quantum efficiency (electrons measured per photon absorbed) was 10 per cent. This alternative approach to photovoltaic energy conversion might provide the basis for durable low-cost solar cells using a variety of materials.     

高功率激光二极管的可靠性研究

在使用综合参数测试仪测试半导体量子阱激光器的过程中，通过测试的功率曲线和伏安特性，断定激光器受到损伤，由扫描电镜(SEM：Scaning Electron Microscopy)观察到激光器的腔面出现了熔化，证实激光器性能的改变是由于产生了暗线缺陷(DLD：Dark Line Difect)和灾变性光损伤(COD：Catastrophic Optical Damage)，通过分析，了解到激光器的退化主要是由器件本身的材料、结构以及后期的工艺过程所决定的，在测试器件过程中电浪涌会加速或产生突然灾变性退化，最后给出了用隔离及无吸收窗口来减少损伤的方法．