With the continuous improvement of the accuracy requirements of the laser processing, the stability of the processing equipment are more and more attention. In this paper, the finite element method is used to analysis the natural frequency and harmonic analysis for high-precision laser processing equipment, and using the air spring to vibration damping for the entire system. The study results showed that the laser processing equipment having a higher natural frequency, the system is more stable when the external excitation frequency is significantly smaller than the first natural frequency, and the damping effect of the air spring under different vibration frequencies are very well, and meet the damping requirements.