图案化聚合物表面的形状记忆特性

吉林大学学报(理学版)

图案化聚合物表面的形状记忆特性

关薇, 胥亦实, 牛立刚, 王艳辉, 于颜豪, 夏虹

吉林大学电子科学与工程学院, 集成光电子学国家重点联合实验室, 长春 130012

收稿日期:2016-10-24 出版日期:2017-05-26 发布日期:2017-05-31
通讯作者: 夏虹 E-mail:hxia@jlu.edu.cn

ShapeMemory Characteristics of Patterned Polymer Surface

GUAN Wei, XU Yishi, NIU Ligang, WANG Yanhui, YU Yanhao, XIA Hong

State Key Laboratory on Integrated Optoelectronics,College of Electronic Science and Engineering, Jilin University, Changchun 130012, China

Received:2016-10-24 Online:2017-05-26 Published:2017-05-31
Contact: XIA Hong E-mail:hxia@jlu.edu.cn

摘要/Abstract

摘要： 利用纳秒激光双光束干涉的光刻方法, 在光刻胶层制备具有周期性的一维光栅结构样品, 并研究其形状记忆特性. 结果表明: 显影后的样品在环境温度为195 ℃及压力的作用下, 光栅形貌发生改变, 光栅垂直高度降低, 衍射光强减弱; 当样品冷却至室温时, 光栅形貌可维持不变; 当样品的环境温度为120 ℃时, 光栅形貌恢复原状, 实现微观形状记忆功能.

关键词: 形状记忆聚合物, 微图案化, 双光束干涉, 微加工

Abstract: By using the method of twobeam interference of nanosecond laser, we fabricated sample of periodic onedimensional grating structure on the photoresist layer, and studied its shapememory characteristics. The results show that the grating morphology of developed sample is changed under the ambient temperature of 195 ℃ and pressure, as well as the vertical height of grating reduced, and the diffraction intensity weakened. When
the sample is cooled to room temperature, the grating morphology can remain unchanged. When ambient temperature of the sample is 120 ℃, the morphology of the grating is restored to the original shape, and microshapememory function is realized.

Key words: twobeam interference, micropatterning, shapememory polymer, microfabrication

中图分类号:

TB381

关薇, 胥亦实, 牛立刚, 王艳辉, 于颜豪, 夏虹. 图案化聚合物表面的形状记忆特性[J]. 吉林大学学报(理学版), 2017, 55(03): 702-706.

GUAN Wei, XU Yishi, NIU Ligang, WANG Yanhui, YU Yanhao, XIA Hong. ShapeMemory Characteristics of Patterned Polymer Surface[J]. Journal of Jilin University Science Edition, 2017, 55(03): 702-706.